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8 Inch Wafer

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Product Detail

    200MM

    SPEC

    0.2um≤30ea

    –

    Diameter(mm)

    200±0.2

    200±0.2

    Type

    P

    P

    Crystal Orientation

    <110>±1

    <110>±1

    Notch Orientation

    <110>±1

    <110>±1

    Resistivity(Ω•cm)

    1-100

    1-100

    Thickness(μm)

    725±25

    725±25

    TTV(μm)

    ≦25

    ≦2

    BOW(μm)

    ≤ 40

    ≤ 40

    WARP(μm)

    ≤ 40

    ≤ 40

    LM

    No

    No

    Surface Metal

    ≤5.0E 10 atom/cm2

    ≤5.0E 10 atom/cm2