Spare parts for ion implantation
Chambers (graphite, tungsten, molybdenum and alloys)
Filaments (tungsten and tungsten alloys)
Blades (graphite, tungsten, molybdenum and alloys)
Brackets (tungsten, molybdenum and alloys)
Cathodes (tungsten, molybdenum and alloys)
Terminals (graphite)
Analyzer parts (graphite)
Insulators (ceramics)
Spare parts (graphite, tungsten, molybdenum and alloys, ceramics, steel)
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