6 Inch Wafer

Product Detail

150MM
SPEC	0.2um≤30ea	0.2um≤30ea
Diameter(mm)	150±0.2	150±0.2
Type	P	P
OF(mm)	57.5±2.5	47.5±2.5
Resistivity(Ω•cm)	1-100	1-100
Thickness(μm)	SEMI	JEIDA
	675±25	675±25
TTV(μm)	≤ 30	≤ 30
BOW(μm)	≤ 40	≤ 40
WARP(μm)	≤ 40	≤ 40
Surface Metal	≤5.0E 10 atom/cm2	≤5.0E 10 atom/cm2