Product Category
RF Power Supply RFG 1250
Product Detail
Full digital control system, high stability and precision power output
Power efficiency >90%
Compact structure and high integration
Rich real-time visualized monitoring
Comprehensive protection functions
Customized products available
AE RFG 1.25kw
When space is limited but performance is critical, the stable, reliable, and compact RF Generator 1.25KW is your ideal solution.
Suitable for fields such as the semiconductor industry, photovoltaic industry, LED industry, flat panel display industry, industrial manufacturing, medical and health industry, scientific experiments, etc., and applicable to processes including PVD, CVD, PECVD, ALD, plasma etching, plasma cleaning, etc.
Product Features
Replaceable Products
Technical Parameters
| Category | Parameter | Details |
|---|---|---|
| Input Power Specifications | Input Voltage | 3Φ 177 to 229V (Nominal 208V) |
| Input Frequency | 50Hz ~ 60Hz | |
| Input Current | 10A, Rated Power | |
| Output Power Specifications | Output Impedance | 50Ω |
| Output Power | 5 ~ 1250W, Output to 50Ω Load | |
| Reflected Power | Equipment protection will be triggered if >250W for over 10s or >450W instantaneously | |
| Power Rise/Fall Time | <5ms | |
| Frequency | 13.56MHz±0.005% | |
| Harmonics | ≤45 dB | |
| Spurious Signals | Non-harmonic spurious and noise signals: -40dBc | |
| Transient Response | AC voltage change 10%, output power change <0.1% | |
| Cooling Specifications | Cooling Method | Water Cooling |
| Flow Rate | 3 ~ 5 L/min | |
| Dimensions & Connector Specifications | Dimensions | 381 (D) ×178 (W) ×125 (H) mm |
| Analog Interface | DB25 female | |
| Communication Interface | RS232 / DB9 female | |
| RF Output Interface | N female | |
| Front Panel Display | IPS Color Screen Display |