Product Category
Advanced Process Low-Energy Large-Beam Ion Implanter
Product Detail
Long-lived high-current ion source
Ion acceleration and extraction system
Analysis of magnetic field based on mass and energy of dual magnets
Wire bundle adjustment system
Beam collimation system
Ultra-pure energy filtration system
Multi-technology collaborative particulate pollution control system
High-precision ion beam measurement system
Wafer scanning and implantation control system
High-efficiency wafer transmission system
Gas system
vacuum system
High-reliability software system
ltem | Trident | Trident XP2 | Hyperion | Hyperion-XP |
Uniformity | 0.7-1.5%(1σ） | 0.6-1.0%(1σ) | 0.6-1.0%(1σ) | 0.6-1.0%(1σ) |
Particles | ≤15 @90nm | ≤15 @37nm | ≤10@37nm | ≤5 @32nm |
Angle Control≥1KeV(HBAS) | <1.0° | <0.8° | <0.8° | <0.8° |
Angle Control ≥1KeV(VBAS) | N/A | <0.8° | <0.8° | <0.8° |
AI Beam tune | No | No | No | Yes |
Beam Tune successful rate | >80% | >90% | >95% | >95% |
Tune Time | 5 min avg | 3.5 min avg | 3.5 min avg | 2.5 min avg est. |
Glitch control | <10 every 2 hours | <10 every 2 hours | <10 every 2 hours | <4 every 2 hours |
Quad 4 Focus | N/A | Quad 4 Focus | Quad 4 Focus | Quad 4 Focus |
Collimator Rods | 12 Rods | 18 Rods | 18 Rods | 18 Rods |
Q1 Lens Enhancement | N/A | Option | Option | Option |
Source Lifetime | >300Hr | >400Hr | >400Hr | >500Hr |
Energy Purity Module (EPM) | Standard | Reduced Rods | Reduced Rods | Reduced Rods |
Crion (Cold)/Thermion (Hot) | Option | Option | Option | Option |
Technical node | Foundry,Logic@2x | Foundry,Logic @5nm &1x | Foundry,Logic @5nm | Foundry,Logic @3nm &5nm |