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SEN,AXCELIS ULTRA,GSD III,HC3 HC 300MM Consumables

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    CategoryDescriptionQtyOEM No.
    ULTRA/GSD III/HC3 SOURCEREPELLER INSULATOR4 STK17E9158
    ULTRA/GSD III/HC3 SOURCEARC CHAMBER1 STK17D6562
    ULTRA/GSD III/HC3 SOURCEFRONT SLIT RETAINER1 STK17D6665
    ULTRA/GSD III/HC3 SOURCEFRONT SLIT TOP, GPH1 EA17D6666
    ULTRA/GSD III/HC3 SOURCEREPELLER MOUNT, REDUCED1 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 SOURCEELS REPELLER (W)1 STK17334410
    ULTRA/GSD III/HC3 SOURCESET SCREW TUNGSTEN4 STK17D8879
    ULTRA/GSD III/HC3 SOURCERETAINING ROD4 STK17D6403
    ULTRA/GSD III/HC3 SOURCEGAS LINE ADAPTOR1 STK17D8878
    ULTRA/GSD III/HC3 SOURCECATHODE RETAINER1 STK17D6015
    ULTRA/GSD III/HC3 SOURCEWVM/TA FILAMENT1000 ST17C2984
    ULTRA/GSD III/HC3 SOURCECATHODE REPELLER1 STK17D3901
    ULTRA/GSD III/HC3 SOURCECATHODE CAP1 STK17D6525
    ULTRA/GSD III/HC3 SOURCEMO THERMAL BRAKE1 STK17D5246
    ULTRA/GSD III/HC3 SOURCEMO INNER CUP SHIELD EGN-217504 EA17121750
    ULTRA/GSD III/HC3 4.5/5.5   SOURCELINER, END, W2 EA17354220
    ULTRA/GSD III/HC3 4.5/5.5   SOURCELINER, BOTTOM, W1 EA17354200
    ULTRA/GSD III/HC3 4.5/5.5   SOURCELINER, SIDE, W2 EA17354210
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEARC SLIT AND RETAINER, W1 EA17360750
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEREPELLER INSULATOR2 STK17E9158
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEMOUNT, REPELLER1 EA17362990
    ULTRA/GSD III/HC3 4.5/5.5   SOURCESHCS, 6-32, .375LG, SST5 EA4400044
    ULTRA/GSD III/HC3 4.5/5.5   SOURCECOVER, INSULATOR2 EA17D8110
    ULTRA/GSD III/HC3 4.5/5.5   SOURCESET SCREW TUNGSTEN2 STK17D8879
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEELS REPELLER (W)1 STK17334410
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEADAPTER, GAS LINE1 EA17354240
    ULTRA/GSD III/HC3 4.5/5.5   SOURCERETAINING ROD4 STK17D6403
    ULTRA/GSD III/HC3 4.5/5.5   SOURCERETAINING RING, E-TYPE4 EA4300031
    ULTRA/GSD III/HC3 4.5/5.5   SOURCESPRING, COMPRESSION COIL4 EA40S0348
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEHEAT SHIELD1 EA17385210
    ULTRA/GSD III/HC3 4.5/5.5   SOURCENUT PLATE, MOLY ELS1 EA17384080
    ULTRA/GSD III/HC3 4.5/5.5   SOURCETOP MOUNT ULTRA 4.5/5.5 ULTRA ARC1 EA170008950
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEFIL. CLAMP, ELS2, SCREW2 EA17335310
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEFEED STRAP, FILAMENT2 EA17356020
    ULTRA/GSD III/HC3 4.5/5.5   SOURCESCREW, SST BHCS .375LG4 EA170056600
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEWASHER, SST FLAT4 EA4400007
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEWASHER, SPLT LOCK4 EA4400034
    ULTRA/GSD III/HC3 4.5/5.5   SOURCESST SHCS .625LG4 EA4400061
    ULTRA/GSD III/HC3 4.5/5.5   SOURCESUPPORT PLATE, REVERSIBLE1 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEINSULATOR, CATHODE1 EA17287870
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEFILAMENT, ELS, STRAIGHT1 EA17287850
    ULTRA/GSD III/HC3 4.5/5.5   SOURCECATHODE ETERNA1 EA17355270
    ULTRA/GSD III/HC3 4.5/5.5   SOURCECATHODE REPELLER1 EA17355290
    ULTRA/GSD III/HC3 4.5/5.5   SOURCEARC CHAMBER, 50 MM VAP KEYED, W1 EA17386160
    GSD III HC3 ION SOURCEARC SLIT AND RETAINER, W1 EA17360750
    GSD III HC3 ION SOURCEARC SLIT AND RETAINER1 STK17360750
    GSD III HC3 ION SOURCEARC CHAMBER1 EA17359610
    GSD III HC3 ION SOURCECATHODE REPELLER1 EA17355290
    GSD III HC3 ION SOURCECATHODE ETERNA1 EA17355270
    GSD III HC3 ION SOURCECATHODE SUPPORT PLATE1 EA17287860
    GSD III HC3 ION SOURCESUPPORT PLATE, REVERSIBLE1 EA17287860
    GSD III HC3 ION SOURCEFILAMENT, ELS, STRAIGHT1 EA17287850
    GSD III HC3 ION SOURCEFILAMENT ELS ASSY1 EA17287850
    GSD III HC3 ION SOURCECLAMP FILAMENT2 EA17287880
    GSD III HC3 ION SOURCEINSULATOR, CATHODE1 EA17287870
    GSD III HC3 ION SOURCERETAINING ROD4 STK17D6403
    GSD III HC3 ION SOURCESPRING, RETAINING ROD4 EA4001167
    GSD III HC3 ION SOURCERETAINING RING, E-TYPE4 EAE43000005
    GSD III HC3 ION SOURCENOZZLE, GAS1 EA17357190
    GSD III HC3 ION SOURCESST SET SCREW .500LG2 EA-
    GSD III HC3 ION SOURCEELS REPELLER1 STK17334410
    GSD III HC3 ION SOURCEELS REPELLER (W)1 STK17334410
    GSD III HC3 ION SOURCEREPELLER INSULATOR2 STK17121850
    GSD III HC3 ION SOURCEMOUNT, REPELLER1 EA17362990
    GSD III HC3 ION SOURCEMO INNER CUP SHIELD EGN-217502 EA17121750
    ULTRA/GSD III/HC3 EXTRACTIONELECTRODE, SUPPRESSION1 EA17335020
    ULTRA/GSD III/HC3 EXTRACTIONELECTRODE, SUPPRESSION1 EA17335000
    ULTRA/GSD III/HC3 EXTRACTIONPLATE, SUPPRESSION1 EA17F2440
    ULTRA/GSD III/HC3 EXTRACTIONHOLDER, SUPPRESSION2 EA17335050
    ULTRA/GSD III/HC3 EXTRACTIONELECTRODE, GROUND LE1 EA17335030
    ULTRA/GSD III/HC3 EXTRACTIONELECTRODE, GROUND HE1 EA17335010
    ULTRA/GSD III/HC3 EXTRACTIONCARRIER, GROUND ELECTRODE1 EA17335040
    ULTRA/GSD III/HC3 EXTRACTIONCOVER, INSULATOR2 EA17E7254
    ULTRA/GSD III/HC3 EXTRACTIONCOVER, NO HOLE INSULATOR2 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 EXTRACTIONINSULATOR, MANIPULATOR HEAD2 EA17E7305
    ULTRA/GSD III/HC3 EXTRACTIONCOVER, INSULATOR2 EA17E7255
    ULTRA/GSD III/HC3 EXTRACTIONCOVER, NO HOLE INSULATOR2 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 EXTRACTIONBRACKET, ELECTRODE2 EA17E7146
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSELECTRODE, SUPPRESSION2 EA17335020
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSPLATE, SUPPRESSION1 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSELECTRODE, GROUND LE2 EA17335030
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSCARRIER, GROUND ELECTRODE DHE1 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSCOVER, INSULATOR2 EA17E7254
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSCOVER, NO HOLE INSULATOR2 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSINSULATOR, MANIPULATOR HEAD2 EA17E7305
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSCOVER, INSULATOR2 EA17E7255
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSCOVER, NO HOLE INSULATOR2 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 DHE   EXTRACTION OPTIONSBRACKET, ELECTRODE2 EA17E7146
    ULTRA/GSD III/HC3 GROUND   INSERT OPTIONSELECTRODE, GROUND LE1 EA17335030
    ULTRA/GSD III/HC3 GROUND   INSERT OPTIONSELECTRODE, GROUND HE1 EA17335010
    ULTRA/GSD III/HC3 GROUND   INSERT OPTIONSINSERT, GROUND ELECTRODE4 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 GROUND   INSERT OPTIONSCARRIER, GROUND ELECTRODE1 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 EXTRACTION   IIELECTRODE, SUPPRESSION1 EA170007090
    ULTRA/GSD III/HC3 EXTRACTION   IIPLATE, SUPPRESSION1 EA170007100
    ULTRA/GSD III/HC3 EXTRACTION   IIINSULATOR, EXTRACTION2 EA170007110
    ULTRA/GSD III/HC3 EXTRACTION   IICOVER, EXTRACTION INSULATOR2 STK170007120
    ULTRA/GSD III/HC3 EXTRACTION   IICOVER, EXTRACTION INSULATOR2 STK170007130
    ULTRA/GSD III/HC3 EXTRACTION   IIELECTRODE, GROUND1 EA170007140
    ULTRA/GSD III/HC3 EXTRACTION   IIGROUND ELECTRODE CARRIER ULTRA1 EA170007150
    ULTRA/GSD III/HC3 EXTRACTION   IIMESH, RIGHT TUNGSTEN1 EA170007170
    ULTRA/GSD III/HC3 EXTRACTION   IIFOIL, RIGHT TUNGSTEN1 STKPLANSEE DESIGN
    ULTRA/GSD III/HC3 EXTRACTION   IIMESH, LEFT TUNGSTEN1 EA170007190
    ULTRA/GSD III/HC3 EXTRACTION   IIFOIL, LEFT TUNGSTEN1 STKPLANSEE DESIGN
    ULTRA/GSD III/HC3 EXTRACTION   IISCREW, SST BHCS .188LG18 EA1231200403
    ULTRA/GSD III/HC3 EXTRACTION   IISUP. ELECTRODE ULTRA 7.01 STK170007310
    ULTRA/GSD III/HC3 EXTRACTION   IIGROUND ELECTRODE ULTRA 7.01 STK170007300
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDELINER BEAMGUIDE, TOP/BOTTOM2 EA17395140
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDESHIELD 2, BOLT HEAD1 EA17394840
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDEPLATE LINER, OUTER BEAM STRIKER1 EA17394910
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDESHIELD 1, BOLT HEAD1 EA17394830
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDELINER1 EA17395170
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDELINER BEAMGUIDE, CENTER2 EA170039120
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDEPLATE LINER, OUTER BEAM STRIKER1 EA170039110
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDELINER (2)1 EA17394880
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDESTRIKER PLATE, LINER OUTER1 EA17394850
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDEBOLT HEAD, SHILED1 EA17394860
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDEAPERTURE NO. 31 EA17359170
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDELINER EXIT BEAMGUIDE2 EA17395160
    ULTRA/GSD III/HC3 ELECTRON   BEAMGUIDELINER1 EA17394890
    ULTRA/GSD III/HC3 RESOLVING   APERTUREAPERTURE, SUPPRESSION1 EA-
    ULTRA/GSD III/HC3 RESOLVING   APERTUREINSULATOR3 EA-
    ULTRA/GSD III/HC3 RESOLVING   APERTUREAPERTURE, RESOLVING, 8, 14, 221 EA-
    ULTRA/GSD III/HC3 RESOLVING   APERTUREAPERTURE, SUPPRESSION, 14, 14, 141 EA-
    ULTRA/GSD III/HC3 RESOLVING   APERTUREAPERTURE, RESOLVING, 14, 14, 141 EA-
    ULTRA/GSDIII/HC3 DECEL   INNERBEAMSTRIKEGRAPHITE INNER RADIUS1 EA17394870
    ULTRA/GSDIII/HC3 DECEL   INNERBEAMSTRIKEGRAPHITE INNER CORNER1 EA17394900
    ULTRA/GSDIII/HC3 DECEL   INNERBEAMSTRIKELINER INNER STRIKER PLATE1 EA17394920
    ULTRA/GSDIII/HC3 DECEL   INNERBEAMSTRIKELINER INNER STRIKER PLATE1 EA17359150
    ULTRA/GSD III/HC3 PEF-XEREINFORCEMENT, FILAMENT STRAP2 EA17B3555
    ULTRA/GSD III/HC3 PEF-XESHIELD, HEAT1 EA17253280
    ULTRA/GSD III/HC3 PEF-XERING, RETAINING1 EA17234180
    ULTRA/GSD III/HC3 PEF-XEREINFORCEMENT, CLAMP ISOLATOR2 EA17243390
    ULTRA/GSD III/HC3 PEF-XESTRIKE PLATE, PEF XE1 EA170010550
    ULTRA/GSD III/HC3 PEF-XEAPERTURE, SHOWER TUBE1 EA170010540
    ULTRA/GSD III/HC3 PEF-XECERAMIC STANDOFF4 STK5000132
    ULTRA/GSD III/HC3 PEF-XEPLATE, SERRATED2 EA17313060
    ULTRA/GSD III/HC3 PEF-XEAPERTURE, SHOWER TUBE1 EA17304670
    ULTRA/GSD III/HC3 PEF-XECOVER, PEF-XE ARC CHAMBER1 EA17329170
    ULTRA/GSD III/HC3 PEF-XEBASE, PEF-XE SHOWER TUBE1 EA17394590
    ULTRA/GSD III/HC3 PEF-XEARC CHAMBER TSL21 EA17234200
    ULTRA/GSD III/HC3 PEF-XEFILAMENT, PEF II1 EAPLANSEE DESIGN
    ULTRA/GSD III/HC3 PEF-XEFILAMENT MOUNTING SCREW1 STK17B5814
    ULTRA/GSD III/HC3 PEF-XEPLATE, FILAMENT LOCATING1 EA17248090
    ULTRA/GSD III/HC3 PEF-XERING, FILAMENT BOTTOM1 EA17248060
    ULTRA/GSD III/HC3 PEF-XEFILAMENT BOTTOM SUPPORT1 EA17248070
    ULTRA/GSD III/HC3 PEF-XEFILAMENT1 STK17263200
    ULTRA/GSD III/HC3 PEF-XEFILAMENT 46.556/001/D1 STK17263200
    ULTRA/GSD III/HC3 BEAM TUNNELSHIELD, TOP/BOTTOM BEAM TUNNEL2 EA17320550
    ULTRA/GSD III/HC3 BEAM TUNNELSIDE PLATE, BEAM TUNNEL2 EA17384620
    ULTRA/GSD III/HC3 FLAG   FARADAYCERAMIC STANDOFF3 STK5000132
    ULTRA/GSD III/HC3 FLAG   FARADAYLOWER COVER, BIAS1 EA17334460
    ULTRA/GSD III/HC3 FLAG   FARADAYREAR COVER, BIAS1 EA170012680
    ULTRA/GSD III/HC3 FLAG   FARADAYLINER, FLAG CUP EXTENSION1 EA170021180
    ULTRA/GSD III/HC3 FLAG   FARADAYPAS LINER, FLAG CUP EXTENSION, TXT1 STKPLANSEE DESIGN
    ULTRA/GSD III/HC3 FLAG   FARADAYAPERTURE, FLAG FARADAY EXTENSION1 EA170016110
    ULTRA/GSD III/HC3 FLAG   FARADAYINSULATOR4 STK1744570
    ULTRA/GSD III/HC3 FLAG   FARADAYM8 CARBON SCREW1 EA17349970
    ULTRA/GSD III/HC3 FLAG   FARADAYSTRIKE PLATE, SERRATED1 STK17362740
    ULTRA/GSD III/HC3 FLAG   FARADAYSTRIKE PLATE, SERRATED1 STK17362740
    ULTRA SOURCE ASSEMBLYSCREW, SST BHCS .375LG4 EAPLANSEE DESIGN
    ULTRA SOURCE ASSEMBLYWASHER, SST FLAT4 EA4400007
    ULTRA SOURCE ASSEMBLYFEED STRAP, FILAMENT2 EA17356020
    ULTRA SOURCE ASSEMBLYSST SHCS .625LG6 EA4400061
    ULTRA SOURCE ASSEMBLYCLAMP, FILAMENT ELS2 STK17390200
    ULTRA SOURCE ASSEMBLYFIL. CLAMP, ELS2, SCREW2 EA17390200
    ULTRA SOURCE ASSEMBLYHC3 CATHODE MOUNT 7.0 SOURCE1 EA170014140
    ULTRA SOURCE ASSEMBLYCATHODE ETERNA1 EA17355270
    ULTRA SOURCE ASSEMBLYCATHODE REPELLER1 EA17355290
    ULTRA SOURCE ASSEMBLYARC SLIT, INTEGRATED RET1 STK17355280
    ULTRA SOURCE ASSEMBLYW ARC SLIT 50.130/001/- #11 STK17355280
    ULTRA SOURCE ASSEMBLYARC SLIT, INTEGRATED RET1 STK17355280
    ULTRA SOURCE ASSEMBLYREPELLER INSULATOR2 STK17121850
    ULTRA SOURCE ASSEMBLYSET SCREW, MOLYBDENUM1 EA17121760
    ULTRA SOURCE ASSEMBLYSPACER ETERNA SOURCE1 EA17357050
    ULTRA SOURCE ASSEMBLYW SPACER ETERNA SOURCE1 STK17357050
    ULTRA SOURCE ASSEMBLYREPELLER MOUNTING PLATE1 EA17E4169
    ULTRA SOURCE ASSEMBLYREPELLER SCREW1 EA17121770
    ULTRA SOURCE ASSEMBLYREPELLER INSULATOR COVER2 STK17D8110
    ULTRA SOURCE ASSEMBLYINSULATOR COVER2 STK17D8110
    ULTRA SOURCE ASSEMBLYREPELLER1 EA17121740
    ULTRA SOURCE ASSEMBLYMO ARC CHAMBER1 STK17386180
    ULTRA SOURCE ASSEMBLYARC CHAMBER TUNGSTEN NO VAPO1 STK17386180
    ULTRA SOURCE ASSEMBLYULTRA ARC CHAMBER MOD1 STK17386180
    ULTRA SOURCE ASSEMBLYSPRING, RETAINING ROD4 EA4001167
    ULTRA SOURCE ASSEMBLYRETAINING ROD4 STK17D6403
    ULTRA SOURCE ASSEMBLYTOP MOUNT ULTRA 4.5/5.5 ULTRA ARC2 EA170008950
    ULTRA SOURCE ASSEMBLYINSULATOR, CATHODE1 EA17287870
    ULTRA SOURCE ASSEMBLYWASHER, SPLT LOCK4 EA4400034
    ULTRA SOURCE ASSEMBLYSST WASHER, FLAT, #6 SP4 EA4400232
    ULTRA SOURCE ASSEMBLYNUT PLATE, MOLY ELS1 EAPLANSEE DESIGN
    ULTRA SOURCE ASSEMBLYFILAMENT, ELS, STRAIGHT1 EA17287850
    ULTRA SOURCE ASSEMBLYFILAMENT ELS ASSY1 EA17287850
    ULTRA SOURCE ASSEMBLYFILAMENT, ELS, ASSY1 STK17287850
    ULTRA SOURCE ASSEMBLYSHCS, 6-32, .375LG, SST2 EA4400044
    GSD REPELLER OPTIONSREPELLER1 EA17121740
    GSD REPELLER OPTIONSREPELLER1 STK17121740
    GSD REPELLER OPTIONSWL10 TIEGEL1000 ST17121740
    GSD REPELLER OPTIONSMO TIEGEL1000 ST17121740
    GSD REPELLER OPTIONSREPELLER1 STKPLANSEE DESIGN
    GSD REPELLER OPTIONSREPELLER, MOD, 15MM1 STKPLANSEE DESIGN
    ULTRA SOURCE MOUNTING FLANGESST, 6-32 SCREW, SHC, .500 LG, MOS28 EA4400100
    ULTRA SOURCE MOUNTING FLANGEW MESH, LARGE ULTRA SOURCE7 EA170008480
    ULTRA SOURCE MOUNTING FLANGESHIELD, SOURCE FLANGE, 4.5/5.51 EA170008490
    ULTRA SOURCE MOUNTING FLANGEFOIL, SMALL SOURCE FLANGE, W1 EA170008470