| Category | Description | OEM No. |
| MC3 II GP SOURCE | FRONT SLIT | 17P7825 |
| MC3 II GP SOURCE | ARC CHAMBER SIDE PLATE ASSY | 17P1226 |
| MC3 II GP SOURCE | ARC CHAMBER SIDE PLATE ASSY | 17P1225 |
| MC3 II GP SOURCE | ARC CHAMBER LOWER PLATE | 17P1224 |
| MC3 II GP SOURCE | ARC CHAMBER TOP PLATE | 17P1227 |
| MC3 II GP SOURCE | ARC CHAMBER BOTTOM PLATE | 17P1228 |
| MC3 II GP SOURCE | INSULATOR COVER 54404001-1 | 17M1707 |
| MC3 II GP SOURCE | REPELLER MTG PLATE | 17P2987 |
| MC3 II GP SOURCE | INSULATOR | 17L4469 |
| MC3 II GP SOURCE | GRAPHITE NUT | 17M9467 |
| MC3 II GP SOURCE | CATHODE SUPPORT PLATE | 17P2694 |
| MC3 II GP SOURCE | CATHODE REPELLER | 17Q9269 |
| MC3 II GP SOURCE | CATHODE ASSY | PLANSEE DESIGN |
| MC3 II GP SOURCE | MO KNOB BOLT | 17M1709 |
| MC3 II GP SOURCE | FILAMENT FEED 63.304001 | 17P2696 |
| MC3 II GP SOURCE | FILAMENT FEED 63.303001 | 17P2695 |
| MC3 II GP SOURCE | FRONT SLIT 60.536/001/_2 | 17P1857 |
| MC3 II GP SOURCE | W A/C SIDE PLATE 60.252/001_2 | 17P0085 |
| MC3 II GP SOURCE | W A/C SIDE PLATE 60.256/001_2 | 17P0084 |
| MC3 II GP SOURCE | W A/C LOWER PLATE | 17P0082 |
| MC3 II GP SOURCE | ARC CHAMBER INNER PLATE TOP | 17P0087 |
| MC3 II GP SOURCE | ARC CHAMBER INNER PLATE BOTTOM | 17P1219 |
| MC3 II GP SOURCE | W A/C TOP PLATE 60.250/001_2 | 17P0083 |
| MC3 II GP SOURCE | W A/C BOTTOM PLATE 60.253/000 | 17P0381 |
| MC3 II GP SOURCE | REPELLER 60.521/001-2 | 17P0093 |
| MC3 II GP SOURCE | RPELLER SUPPORT | 17P4435 |
| MC3 II GP SOURCE | #6-32 KNOB BOLT | 17G2054 |
| MC3 II GP SOURCE | INSULATOR COVER 54404001-1 | 17L8052 |
| MC3 II GP SOURCE | REPELLER INSULATOR | 17121850 |
| MC3 II GP SOURCE | REPELLER INSULATOR COVER | 17D8110 |
| MC3 II GP SOURCE | REPELLER MTG PLATE | 17P2987 |
| MC3 II GP SOURCE | ARC CHAMBER MOUNTING TOP | 17P2692 |
| MC3 II GP SOURCE | ARC CHAMBER MOUNTING BOTTOM | 17P2693 |
| MC3 II GP SOURCE | INSULATER | 17E9766 |
| MC3 II GP SOURCE | GRAPHITE NUT | 17D1455 |
| MC3 II GP SOURCE | CATHODE SUPPORT PLATE | 17P2694 |
| MC3 II GP SOURCE | MO KNOB BOLT | 17C5290 |
| MC3 II GP SOURCE | FILAMENT CLAMP (L) | 17L7169 |
| MC3 II GP SOURCE | WVM/TA FILAMENT | 17C2984 |
| MC3 II GP SOURCE | CATHODE REPELLER 60.527/001-2 | 17P1800 |
| MC3 II GP SOURCE | CATHODE CAP | 17D5565 |
| MC3 II GP SOURCE | FILAMENT CLAMP (R) | 17L7170 |
| MC3 II GP SOURCE | MO INSULATOR COVER 60.263/001_1 | 17P0384 |
| MC3 II GP SOURCE | THERMAL BRAKE (W) | 17D8882 |
| MC3 II GP SOURCE | CATHODE RETAINER | 17D6015 |
| MC3 II GP SOURCE | MO INSULATOR COVER 60.264/001_1 | 17M9970 |
| MC3 II GP SOURCE | KNOB BOLT | 17D3034 |
| MC3 II GP SOURCE | MO PLATE | 17K5084 |
| MC3 II GP SOURCE | TAM RETAINING ROD 60.257/001_5 | 17P2417 |
| MC3 II GP SOURCE | SPRING COMPRESSION, SS | 17P1019 |
| MC3 II GP SOURCE | SPRING COMPRESSION, SS | 40S0348 |
| MC3 II GP SOURCE | FILAMENT FEED | 17L7172 |
| MC3 II GP SOURCE | FILAMENT FEED | 17L7171 |
| MC3 II GP EXTRACTION | SUPPRESSION ELECTRODE 60.824/001 | 17P3218 |
| MC3 II GP EXTRACTION | SUPPRESSION PLATE | 17P8503 |
| MC3 II GP EXTRACTION | GROUND ELECTRODE | 17P8501 |
| MC3 II GP EXTRACTION | GROUND ELECTRODE CARRIER | 17P8502 |
| MC3 II GP EXTRACTION | INSULATOR | 17P8500 |
| MC3 II SOURCE | FRONT SLIT | 17L0634 |
| MC3 II SOURCE | ARC CHAMBER | 17J3430 |
| MC3 II SOURCE | GAS LINE ADAPTER | 17E5553 |
| MC3 II SOURCE | COVER | 17J5290 |
| MC3 II SOURCE | CATHODEINSULATOR | 17J0201 |
| MC3 II SOURCE | COVER (MO) | 17J5287 |
| MC3 II SOURCE | WVM/TA FILAMENT | 17C2984 |
| MC3 II SOURCE | CATHODE REPELLER (W) | 17D8986 |
| MC3 II SOURCE | CATHODE CAP | 17D6525 |
| MC3 II SOURCE | THERMAL BRAKE (W) | 17D8882 |
| MC3 II SOURCE | CATHODE RETAINER | 17D6015 |
| MC3 II SOURCE | CATHODE SUPPORT PLATE | 17J5286 |
| MC3 II SOURCE | GRAPHITE NUT | 17D1455 |
| MC3 II SOURCE | FILAMENT CLAMP | 17J0203 |
| MC3 II SOURCE | FILAMENT CLAMP | 17J0202 |
| MC3 II SOURCE | CATHODE LINE WIRE ASSY | 11B2213 |
| MC3 II SOURCE | SCREW MO | 17J0207 |
| MC3 II SOURCE | FLAT WASHER MO | 17J0208 |
| MC3 II SOURCE | REPELLER | 17C4085 |
| MC3 II SOURCE | SET SCREW TUNGSTEN | 17C4092 |
| MC3 II SOURCE | REPELLER INSULATOR | 17121850 |
| MC3 II SOURCE | INNER CUP SHIELD | 17C4084 |
| MC3 II SOURCE | SCREW, REPELLER | 17121770 |
| MC3 II SOURCE | FILAMENT FEED | 17J0204 |
| MC3 II SOURCE | FILAMENT FEED | 17J0205 |
| MC3 II SOURCE | RETAINING ROD | 17J0199 |
| MC3 II SOURCE | SPRING COMPRESSION, SS | 40S0348 |
| MC3 II EXTRACTION | GROUND PLATE STANDOFF | 17E0729 |
| MC3 II EXTRACTION | INSULATOR | 17E9158 |
| MC3 II EXTRACTION | EXTRACTION ELECTRODE | 17K3197 |
| MC3 II EXTRACTION | GROUND ELECTRODE | 17K3198 |
| MC3 II EXTRACTION | SUPPRESSION PLATE | 17K3461 |
| MC3 II EXTRACTION | GROUND ELECTOR CARRIER ASSY | 17K3463 |
| BEAM GUIDE | APERTURE | 17P3166 |
| BEAM GUIDE | GRAPHITE SHIELD | 17P3617 |
| BEAM GUIDE | GRAPHITE SHIELD | 17K1052 |
| BEAM GUIDE | GRAPHITE PLATE | 17K1053 |
| BEAM GUIDE | GRAPHITE PLATE | 17P3618 |
| BEAM GUIDE | GRAPHITE LINER | 17P3619 |
| BEAM GUIDE | APERTURE PLATE | 17M5000 |
| MC3 II AMU BEAM GUIDE ASSY | GRAPHITE PLATE | 17K1053 |
| MC3 II AMU BEAM GUIDE ASSY | GRAPHITE PLATE | 17J1621 |
| MC3 II AMU BEAM GUIDE ASSY | APERTURE PLATE | 17J1622 |
| MC3 II AMU BEAM GUIDE ASSY | GRAPHITE SHIELD | 17K1052 |
| MC3 II AMU BEAM GUIDE ASSY | GRAPHITE SHIELD | 17K1051 |
| MC3 II AMU BEAM GUIDE ASSY | GRAPHITE BAFFLE | 17K1054 |
| MC3 AMU BEAM GUIDE ASSY | BAFFLE MAGNET BEAM DUMP OUTER | 17E3439 |
| MC3 AMU BEAM GUIDE ASSY | BAFFLE MAGNET BEAM DUMP EXIT | 17E3438 |
| MC3 AMU BEAM GUIDE ASSY | SHIELD ANALYZING MAGNET BALL | 17E3440 |
| MC3 AMU BEAM GUIDE ASSY | BAFFLE MAGNET BEAM DUMP INNER | 17E3442 |
| MC3 II BEAM SHUTTER | APERTURE | 17L6888 |
| MC3 II BEAM SHUTTER | ROTARY SHUTTER | 17K3010 |
| MC3 II BEAM SHUTTER | INSULATOR PLATE | 17K9467 |
| MC3 II BEAM SHUTTER | BARN THROUGH PLATE | 17K9466 |
| MC3 II BEAM SHUTTER | APERTURE (2) | 17E0830 |
| MC3 II BEAM SHUTTER | ROTARY SHUTTER | 17J7664 |
| MC3 300MM PLASMA SHOWER ASSY | FILAMENT MOUNTING SCREW | 17J4320 |
| MC3 300MM PLASMA SHOWER ASSY | INSULATOR | 17J4321 |
| MC3 300MM PLASMA SHOWER ASSY | ARC CHAMBER INSULATOR | 17J4323 |
| MC3 300MM PLASMA SHOWER ASSY | FILAMENT CLAMP | 17J4319 |
| MC3 300MM PLASMA SHOWER ASSY | FILAMENT 46.538/001/ | 17B3496 |
| MC3 300MM PLASMA SHOWER ASSY | ARC CHAMBER HOUSING | 17J4313 |
| MC3 300MM PLASMA SHOWER ASSY | INSULATOR (2) | 17J4318 |
| MC3 300MM PLASMA SHOWER ASSY | FILAMENT INSULATOR | 17J4315 |
| MC3 300MM PLASMA SHOWER ASSY | INSULATOR (1) | 17J4314 |
| MC3 300MM PLASMA SHOWER ASSY | R3050-8320 CERAMIC BUSHING | 42S0655 |
| MC3 300MM PLASMA SHOWER ASSY | INSULATOR | 17K8846 |
