| Category | Description | Qty | OEM No. |
| HE3 SOURCE | FRONT SLIT | 1 STK | 17C8383 |
| HE3 SOURCE | ARC CHAMBER | 1 STK | 17D9026 |
| HE3 SOURCE | GAS LINE ADAPTOR | 1 STK | 17C8405 |
| HE3 SOURCE | SET SCREW MOLYBDENUM | 6 STK | 17C2983 |
| HE3 SOURCE | MO PLATE | 1 STK | 17D0229 |
| HE3 SOURCE | WVM/TA FILAMENT | 2000 ST | 17C2984 |
| HE3 SOURCE | CATHODE REPELLER | 2 STK | 17D3901 |
| HE3 SOURCE | CATHODE CAP | 2 STK | 17D5565 |
| HE3 SOURCE | MO THERMAL BRAKE1200489 | 2 STK | 17D5246 |
| HE3 SOURCE | CATHODE RETAINER | 2 STK | 17D6015 |
| HE3 SOURCE | CATHODE SUPPORT PLATE | 2 STK | 17D0487 |
| HE3 SOURCE | GRAPHITE NUT | 2 EA | 17D1455 |
| HE3 SOURCE | INSULATOR | 8 STK | 17G1002 |
| HE3 SOURCE | INSULATOR COVER | 8 STK | 17G1274 |
| HE3 SOURCE | FILAMENT CLAMP | 2 STK | 17C4775 |
| HE3 SOURCE | FILAMENT CLAMP | 2 STK | 17C4776 |
| HE3 SOURCE | MO KNOB BOLT | 8 STK | 17C5290 |
| HE3 SOURCE | INSULATOR | 4 STK | 17E9158 |
| HE3 SOURCE | INSULATOR COVER | 5 STK | 17C2988 |
| HE3 SOURCE | #6-32 KNOB BOLT | 4 STK | 17C3359 |
| HE3 SOURCE | CERAMIC STANDOFF | 2 STK | 5000132 |
| HE3 SOURCE | KNOB BOLT | 2 STK | 17D3034 |
| HE3 SOURCE | WIRE | 1 STK | 7400071 |
| HE3 SOURCE | ROD, RETAINING TA | 4 EA | 17036440 |
| HE3 SOURCE | SPRING COMPRESSION, SS | 4 STK | 40S0348 |
| HE3 EXTRACTION | GROUND ELECTRODE | 1 EA | 17S3632 |
| HE3 EXTRACTION | CURVED SHIELD BLOCK | 1 EA | 17S3619 |
| HE3 EXTRACTION | SHIELD CUP | 4 STK | 1711261 |
| HE3 EXTRACTION | CERAMIC STANDOFF | 4 STK | 5000132 |
| HE3 EXTRACTION | SHIELD CUP | 4 STK | 1711262 |
| HE3 EXTRACTION | GROUND ELECTRODE CARRIER | 1 EA | 17G7147 |
| SUHE SOURCE | FRONT SLIT 611370001-2 | 1 STK | 17Q2993 |
| SUHE SOURCE | ARC CHAMBER | 1 STK | 17E3813 |
| SUHE SOURCE | GAS LINE ADAPTOR | 1 STK | 17E1944 |
| SUHE SOURCE | ARC CHAMBER MOUNT | 2 STK | 17Q2995 |
| SUHE SOURCE | MO PLATE | 1 STK | 17D0229 |
| SUHE SOURCE | WVM/TA FILAMENT | 2000 ST | 17C2984 |
| SUHE SOURCE | CATHODE REPELLER | 2 STK | 17D5511 |
| SUHE SOURCE | CATHODE CAP | 2 STK | 17D5565 |
| SUHE SOURCE | THERMAL BRAKE (W) | 2 STK | 17D8882 |
| SUHE SOURCE | CATHODE RETAINER 611371001-6 | 2 STK | 17Q1436 |
| SUHE SOURCE | CATHODE SUPPORT PLATE | 2 STK | 17Q2991 |
| SUHE SOURCE | GRAPHITE NUT | 2 EA | 17D1455 |
| SUHE SOURCE | SET SCREW TUNGSTEN | 4 STK | 17D8879 |
| SUHE SOURCE | REPELLER INSULATOR | 4 STK | 17121850 |
| SUHE SOURCE | INSULATOR COVER | 4 STK | 17C2988 |
| SUHE SOURCE | #6-32 KNOB BOLT | 4 STK | 17C3359 |
| SUHE SOURCE | INSULATOR COVER | 8 STK | 17P0384 |
| SUHE SOURCE | INSULATOR | 8 STK | 17L4469 |
| SUHE SOURCE | INSULATOR COVER | 8 STK | 17M9970 |
| SUHE SOURCE | FILAMENT CLAMP | 1 STK | 17C4775 |
| SUHE SOURCE | FILAMENT CLAMP | 1 STK | 17C4776 |
| SUHE SOURCE | MO KNOB BOLT | 8 STK | 17C5290 |
| SUHE EXTRACTION | SUPPRESSION ELECTRODE | 1 STK | 17Q3032 |
| SUHE EXTRACTION | SUPPRESSION PLATE | 1 STK | 17Q3381 |
| SUHE EXTRACTION | GROUND ELECTRODE | 1 STK | 17Q3040 |
| SUHE EXTRACTION | GROUND ELECTRODE CARRIER | 1 STK | 17Q3039 |
| SUHE EXTRACTION | SHIELD | 1 STK | 17Q3033 |
| SUHE EXTRACTION | SUPPORT PLATE | 1 STK | 17P4648 |
| SUHE EXTRACTION | INSULATOR COVER | 4 STK | 17P4641 |
| SUHE EXTRACTION | INSULATOR | 4 STK | 17G2359 |
| SUHE EXTRACTION | INSULATOR COVER | 4 STK | 17P4642 |
| SUHE EXTRACTION | ELECTRODE STAND OFF | 4 STK | 17Q3034 |
| SUHE EXTRACTION | ELECTRODE MOUNTING STRAP | 2 STK | 1701730 |
| SUHE EXTRACTION | SPECIAL SCREW 1_4-20UNC | 1 STK | 17Q3370 |
| SUHE GSS AND WL ARC CHAMBER | FRONT SLIT | 1 STK | PLANSEE DESIGN |
| SUHE GSS AND WL ARC CHAMBER | LINER SIDE | 2 STK | PLANSEE DESIGN |
| SUHE GSS AND WL ARC CHAMBER | LINER CATHODE | 2 STK | PLANSEE DESIGN |
| SUHE GSS AND WL ARC CHAMBER | LINER BASE | 1 STK | PLANSEE DESIGN |
| SUHE GSS AND WL ARC CHAMBER | CATHODE REPELLER | 2 STK | PLANSEE DESIGN |
| SUHE GSS AND WL ARC CHAMBER | THERMAL BREAK | 2 STK | PLANSEE DESIGN |
| SUHE GSS AND WL ARC CHAMBER | GS ARC CHAMBER BASE | 1 STK | PLANSEE DESIGN |
| SUHE GSS AND WL ARC CHAMBER | GAS LINE ADAPTER (W) | 1 STK | 17D8878 |
| SUHE GSS AND WL ARC CHAMBER | CATHODE RETAINER 611371001-6 | 2 STK | 17Q1436 |
| HE3 SEPARATE ARC CHAMBER | W ARC CHAMBER REAR PLATE HE | 1 STK | PLANSEE DESIGN |
| HE3 SEPARATE ARC CHAMBER | W ARC CHAMBER ASSY HE 57.659/000/- | 1 STK | PLANSEE DESIGN |
| HE3 SEPARATE ARC CHAMBER | MO GAS JOINT ASSY 57.663/000/- | 1 STK | PLANSEE DESIGN |