| Category | Plansee No. | Description | Qty | OEM No. |
| SOURCE SUPPORT BLOCK | 11370529 | SOURCE SUPPORT BLOCK | 1 STK | 17C9645 |
| LEGACY FILAMENT CLAMP ASSEMBLY | 11633346 | REV CATHODE SUPPORT PLT | 1 EA | 17189150 |
| LEGACY FILAMENT CLAMP ASSEMBLY | 12166188 | REV CATHODE SUPPORT PLT | 1 STK | 17189150 |
| LEGACY FILAMENT CLAMP ASSEMBLY | 11631977 | CATHODE INSULATOR | 1 EA | 17133270 |
| LEGACY FILAMENT CLAMP ASSEMBLY | 11451190 | FILAMENT CLAMP JIG | 2 STK | 17170580 |
| LEGACY FILAMENT CLAMP ASSEMBLY | 11380672 | FILAMENT CLAMP (R) | 1 STK | 17133450 |
| LEGACY FILAMENT CLAMP ASSEMBLY | 11380674 | FILAMENT CLAMP (L) | 1 STK | 17133451 |
| LEGACY SOURCE COMPONENTS | 11380641 | VAPORIZER CAP | 1 STK | 1706380 |
| LEGACY SOURCE COMPONENTS | 11382497 | INSULATOR FILAMENT FEED THROUGH | 1 STK | 17127830 |
| LEGACY SOURCE COMPONENTS | 11370592 | FILAMENT FEED THROGH | 1 STK | 17033020 |
| LEGACY SOURCE COMPONENTS | 11370594 | FILAMENT FEED THROUGH | 1 STK | 17033021 |
| LEGACY SOURCE COMPONENTS | 11370815 | FILAMENT SHIELD | 1 STK |
|
| APERTURE, BEAM SHUTTER UPSTREAM | 11637468 | APERTURE, BEAM SHUTTER UPSTREAM | 1 EA | 029500730004 |
| PAS APERTURE, BEAM SHUTTER UPSTREAM | 11637469 | APERTURE, BEAM SHUTTER UPSTREAM | 1 EA |
|
| PAS APERTURE, BEAM SHUTTER UPSTREAM | 11637470 | INSERT, APERTURE, BEAM SHUTTER | 1 EA |
|
| PAS APERTURE, BEAM SHUTTER UPSTREAM | 11633509 | GRAPHITE SCREW | 2 EA |
|
| APERTURE, BEAM SHUTTER DOWNSTREAM | 12436364 | APERTURE, BEAM SHUTTER, DOWN | 1 STK | 029500730004 |
| GSD 200 SOURCE PARTS | 11457766 | CATHODE SUPPORT PLATE | 1 STK | 17189150 |
| GSD 200 SOURCE PARTS | 11633346 | REV CATHODE SUPPORT PLT | 1 EA |
|
| GSD 200 SOURCE PARTS | 12166188 | REV CATHODE SUPPORT PLT | 1 STK |
|
| GSD 200 SOURCE PARTS | 11386708 | RETAINING ROD | 4 STK | 17036440 |
| GSD 200 SOURCE PARTS | 11631973 | ROD, RETAINING TA | 4 EA |
|
| ELS SOURCE OPTION | 11098624 | MO ARC CHAMBER ELS 42.028/000/ | 1.000 ST | 089700410003 |
| ELS SOURCE OPTION | 11109152 | MO-KAMMER 42.306/000/- | 1.000 ST | 17278160 |
| ELS SOURCE OPTION | 11110023 | MO - KAMMER | 1.000 ST | 089700410001 |
| ELS SOURCE OPTION | 11111262 | MO BODY, A/C LINER VERSION 42.345 | 1 EA | 17133400 |
| ELS SOURCE OPTION | 11135781 | WL KAMMER | 1.000 ST | 17133400 |
| INSULATORS | 11380179 | CATHODE SUPPORT INSULATOR | 1 STK | 17121900 |
| INSULATORS | 11862279 | INSULATOR, REPELLER, PAS GSD, STD | 1 STK |
|
| INSULATORS | 12017534 | INSULATOR, REPELLER, PAS GSD, STD | 1 STK |
|
| INSULATORS | 11634039 | FILAMENT INSULATOR | 1 EA | 17248080 |
| GAS LINE COMPONENTS | 11357790 | MO- ANSCHLUSS 46.344/002/- | 1 EA |
|
| GAS LINE COMPONENTS | 11153928 | WL10 NOZZLE | 1 EA | 17311740 |
| GAS LINE COMPONENTS | 12027982 | GAS FEED TUBE ASSY | 1 STK |
|
