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AXCELIS OPTIMA Spare Parts

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    CategoryDescriptionQtyOEM No.
    OPTIMA MC SOURCE ASSEMBLYCOVER PLATE, SOURCE, OPTIMA1 STK
    OPTIMA MC SOURCE ASSEMBLYARC SLIT RETAINER SCREW4 EA
    OPTIMA MC SOURCE ASSEMBLY6-32 SHCSLV .563LG MO1 EAN/A
    OPTIMA MC SOURCE ASSEMBLYFILAMENT INSULATOR1 EA1708680
    OPTIMA MC SOURCE ASSEMBLYREPELLER INSULATOR1 STK17121850
    OPTIMA MC SOURCE ASSEMBLYINNER CUP SHIELD1 EA
    OPTIMA MC SOURCE ASSEMBLYMOUNT BRACKET, REPELLER1 EA471000690001
    OPTIMA MC SOURCE ASSEMBLYNUT PLATE, MOLY ELS1 EA17189140
    OPTIMA MC SOURCE ASSEMBLYHEX, NUT 6-324 EAN/A
    OPTIMA MC SOURCE ASSEMBLYSST LOCK WASHER4 EAN/A
    OPTIMA MC SOURCE ASSEMBLYMOUNT BRACKET, CATHODE1 EA471000700001
    OPTIMA MC SOURCE ASSEMBLYARC CHAMBER, W, ELS1 EA17311940
    OPTIMA MC SOURCE ASSEMBLYREPELLER, NO HOLE, W1 EA
    OPTIMA MC SOURCE ASSEMBLYARC SLIT 2.8 MM TUNGSTEN, FLAT1 EA170071160
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYCOVER PLATE, SOURCE, OPTIMA1 STK
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYARC SLIT RETAINER SCREW4 EA
    OPTIMA TIE-DOWN SOURCE   ASSEMBLY6-32 SHCSLV .563LG MO1 EAN/A
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYFILAMENT INSULATOR1 EA1708680
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYREPELLER INSULATOR1 STK17121850
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYINNER CUP SHIELD1 EA
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYMOUNT BRACKET, REPELLER1 EA471000690001
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYNUT PLATE, MOLY ELS1 EA17189140
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYHEX, NUT 6-324 EAN/A
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYSST LOCK WASHER4 EAN/A
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYMOUNT BRACKET, CATHODE1 EA471000700001
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYARC CHAMBER, W, ELS1 EA17311940
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYREPELLER, NO HOLE, W1 EA
    OPTIMA TIE-DOWN SOURCE   ASSEMBLYARC SLIT 2.8 MM TUNGSTEN, FLAT1 EA170071160
    ELS2 FILAMENT ASSEMBLYSST BHCS .250LG1 EA4400008
    ELS2 FILAMENT ASSEMBLYSST WASHER, FLAT, #61 EAN/A
    ELS2 FILAMENT ASSEMBLYSUPPORT PLATE, REVERSIBLE1 EA
    ELS2 FILAMENT ASSEMBLYFILAMENT ELS ASSY1 EA
    ELS2 FILAMENT ASSEMBLYCATHODE, ELS21 EA17246790
    ELS2 FILAMENT ASSEMBLYCATHODE REPELLER1 EA17133340
    ELS2 FILAMENT ASSEMBLYSHCS, 6-32, .375LG, SST2 EA4400044
    ELS2 FILAMENT ASSEMBLYSST WASHER, FLAT, #6 SP2 EA4400232
    ELS2 FILAMENT ASSEMBLYINSULATOR, CATHODE1 EA17287870
    ELS2 FILAMENT ASSEMBLYSST SHCS .750 LG2 EA4400842
    ELS2 FILAMENT ASSEMBLYCATHODE WIRE1 EA17156990
    ELS2 FILAMENT ASSEMBLYFILAMENT FEED STRAP2 EA17133300
    ELS2 FILAMENT ASSEMBLYSCREW, 10-32, SHCSV, 375, S2 EA4400743
    ELS2 FILAMENT ASSEMBLYWASHER, SST FLAT6 EA4400007
    ELS2 FILAMENT ASSEMBLYSST LOCK WASHER2 EA4400041
    ELS2 FILAMENT ASSEMBLYSCREW, SST BHCS .375LG4 EA
    ELS2 FILAMENT ASSEMBLYSST SHCS .625LG4 EA4400061
    ELS2 FILAMENT ASSEMBLYWASHER, SPLT LOCK6 EA4400034
    ELS2 FILAMENT ASSEMBLYFIL. CLAMP, ELS2, SCREW2 EA17335310
    OPTIMA ARC SLIT OPTIONSARC SLIT 2.8 MM TUNGSTEN, FLAT1 EA170071160
    OPTIMA ARC SLIT OPTIONSARC SLIT, MC, FLAT FACE, TIE DOWN1 EA
    OPTIMA ARC SLIT OPTIONSARC SLIT, W, HC, CURVED FACE1 EA170041040
    OPTIMA ARC SLIT OPTIONSARC SLIT HC, TIE DOWN1 EA
    OPTIMA ARC SLIT OPTIONSARC SLIT1 EA170058160
    OPTIMA ARC SLIT OPTIONSAC,TOP1.000 ST17277260
    CATHODE OPTIONSCATHODE, ELS1 EA17142890
    CATHODE OPTIONSCATHODE, ELS21 EA17142890
    CATHODE OPTIONSCATHODE ASSY1 STK17142890
    CATHODE OPTIONSCATHODE ASSY # 41 STK17142890
    CATHODE OPTIONSCATHODE SUB AS1 EA1724679
    CATHODE OPTIONSCATHODE, ELS1 EA17158000
    CATHODE OPTIONSCATHODE ASSY TUNGSTEN1 STK17158000
    CATHODE OPTIONSCATHODE, ELS, CAN STYLE1 EA17158000
    CATHODE OPTIONSCATHODE ETERNA1 EA17355270
    CATHODE OPTIONSCATHODE W 6MM1 STK
    CATHODE OPTIONSCATHODE, ELS, CAN STYLE, SMALL DIA.1 EA170093650
    CATHODE OPTIONSCATHODE REPELLER1 EA17121930
    CATHODE OPTIONSTZM-CATHODE REPELLER Ø 19,939 X1 EA17121930
    CATHODE OPTIONSCATHODE REPELLER1 EA17121930
    CATHODE OPTIONSWL-CATHODE REPELLER Ø19,939 X1.000 ST17121930
    CATHODE OPTIONSCATHODE REPELLER1 STK17355290
    CATHODE OPTIONSCATHODE REPELLER,THREADCOVER1 EA17121930
    OPTIMA EXTRACTION ASSEMBLYELECTRODE, SUPPRESSION1 EA170007090
    OPTIMA EXTRACTION ASSEMBLYPLATE, SUPPRESSION1 EA170007100
    OPTIMA EXTRACTION ASSEMBLYINSULATOR, EXTRACTION2 EA170007110
    OPTIMA EXTRACTION ASSEMBLYCOVER, EXTRACTION INSULATOR2 STK170007120
    OPTIMA EXTRACTION ASSEMBLYCOVER, EXTRACTION INSULATOR2 STK170007130
    OPTIMA EXTRACTION ASSEMBLYELECTRODE, GROUND1 EA170007140
    OPTIMA EXTRACTION ASSEMBLYCARRIER, GROUND ELECTRODE1 STK170041140
    OPTIMA EXTRACTION ASSEMBLYMESH, RIGHT TUNGSTEN1 EA170007170
    OPTIMA EXTRACTION ASSEMBLYFOIL, RIGHT TUNGSTEN1 STK
    OPTIMA EXTRACTION ASSEMBLYMESH, LEFT TUNGSTEN1 EA170007190
    OPTIMA EXTRACTION ASSEMBLYFOIL, LEFT TUNGSTEN1 STK
    OPTIMA EXTRACTION ASSEMBLYSCREW, 4-40, BHCS, .188, SST18 EA1231200403
    OPTIMA BEAM SHUTTERBEAM SHUTTER, OPTIMA, EXTENDED1 EA
    OPTIMA BEAM SHUTTERROTARY SHUTTER1 STK712100170002
    APERTURE, SOURCE HOUSING EXITAPERTURE, SOURCE HOUSING EXIT1 STK170033750