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AXCELIS PARADIGM XE/HE3 Spare Parts

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    CategoryDescriptionQtyOEM No.
    PARADIGM XE/HE3 SOURCE   ASSEMBLYARC SLIT, 20R, MO1 EA17165580
    PARADIGM XE/HE3 SOURCE   ASSEMBLYREPELLER, NO HOLE, W1 EA
    PARADIGM XE/HE3 SOURCE   ASSEMBLYREPELLER INSULATOR1 STK17121850
    PARADIGM XE/HE3 SOURCE   ASSEMBLYMO INNER CUP SHIELD EGN-217501 EA17121750
    PARADIGM XE/HE3 SOURCE   ASSEMBLYREPELLER SCREW1 EA17121770
    PARADIGM XE/HE3 SOURCE   ASSEMBLYARC CHAMBER1 EA17133400
    PARADIGM XE/HE3 SOURCE   ASSEMBLYBODY, ARC CHAMBER (ELS)1 EA
    PARADIGM XE/HE3 SOURCE   ASSEMBLYSPACER, SHOULDER SCREW4 EA17128230
    PARADIGM XE/HE3 SOURCE   ASSEMBLYROD, RETAINING TA4 EA17036440
    PARADIGM XE/HE3 SOURCE   ASSEMBLYSPACER, RETAINING ROD4 EA17124410
    PARADIGM XE/HE3 SOURCE   ASSEMBLYRETAINING RING, E-TYPE4 EA4300031
    PARADIGM XE/HE3 SOURCE   ASSEMBLYSPRING, SHOULDER SCREW4 EA4001166
    PARADIGM XE/HE3 SOURCE   ASSEMBLYSOCKET JOINT3 EA17033150
    PARADIGM XE/HE3 SOURCE   ASSEMBLYHEAT SHIELD ELS1 STK17142660
    PARADIGM XE/HE3 SOURCE   ASSEMBLYSPRING, SHOULDER SCREW3 EA4001166
    PARADIGM XE/HE3 SOURCE   ASSEMBLY*BALL JOINT3 EA17033160
    PARADIGM XE/HE3 SOURCE   ASSEMBLYSPRING, RETAINING ROD4 EA4000059
    PARADIGM XE/HE3 SOURCE   ASSEMBLYNUT PLATE, MOLY ELS1 EA17189140
    PARADIGM XE/HE3 SOURCE   ASSEMBLYSCREW, ARC CHAMBER MOUNT4 EA17127640
    ELS2 FILAMENT ASSEMBLYSST BHCS .250LG1 EA4400008
    ELS2 FILAMENT ASSEMBLYSST WASHER, FLAT, #61 EAN/A
    ELS2 FILAMENT ASSEMBLYSUPPORT PLATE, REVERSIBLE1 EA
    ELS2 FILAMENT ASSEMBLYFILAMENT ELS ASSY1 EA
    ELS2 FILAMENT ASSEMBLYCATHODE, ELS21 EA17246790
    ELS2 FILAMENT ASSEMBLYCATHODE REPELLER1 EA17133340
    ELS2 FILAMENT ASSEMBLYSHCS, 6-32, .375LG, SST2 EA4400044
    ELS2 FILAMENT ASSEMBLYSST WASHER, FLAT, #6 SP2 EA4400232
    ELS2 FILAMENT ASSEMBLYINSULATOR, CATHODE1 EA17287870
    ELS2 FILAMENT ASSEMBLYSST SHCS .750 LG2 EA4400842
    ELS2 FILAMENT ASSEMBLYCATHODE WIRE1 EA17156990
    ELS2 FILAMENT ASSEMBLYFILAMENT FEED STRAP2 EA17133300
    ELS2 FILAMENT ASSEMBLYSST, SHCSV .375LG2 EA4400743
    ELS2 FILAMENT ASSEMBLYWASHER, SST FLAT6 EA4400007
    ELS2 FILAMENT ASSEMBLYSST LOCK WASHER2 EA4400041
    ELS2 FILAMENT ASSEMBLYSCREW, SST BHCS .375LG4 EA
    ELS2 FILAMENT ASSEMBLYSST SHCS .625LG4 EA4400061
    ELS2 FILAMENT ASSEMBLYWASHER, SPLT LOCK6 EA4400034
    ELS2 FILAMENT ASSEMBLYFIL. CLAMP, ELS2, SCREW2 EA17335310
    CATHODE OPTIONSCATHODE, ELS1 EA17142890
    CATHODE OPTIONSCATHODE, ELS21 EA17142890
    CATHODE OPTIONSCATHODE ASSY1 STK17142890
    CATHODE OPTIONSCATHODE ASSY #41 STK17142890
    CATHODE OPTIONSCATHODE SUB AS1 EA1724679
    CATHODE OPTIONSCATHODE, ELS1 EA17158000
    CATHODE OPTIONSCATHODE ASSY TUNGSTEN1 STK17158000
    CATHODE OPTIONSCATHODE, ELS, CAN STYLE1 EA17158000
    CATHODE OPTIONSCATHODE ETERNA1 EA17355270
    CATHODE OPTIONSCATHODE W 6MM1 STK
    CATHODE OPTIONSCATHODE, ELS, CAN STYLE, SMALL DIA.1 EA170093650
    CATHODE OPTIONSCATHODE REPELLER1 EA17121930
    CATHODE OPTIONSTZM-CATHODE REPELLER Ø 19,939 X1 EA17121930
    CATHODE OPTIONSCATHODE REPELLER1 EA17121930
    CATHODE OPTIONSWL-CATHODE REPELLER Ø19,939 X 1,000 ST
    17121930
    CATHODE OPTIONSCATHODE REPELLER1 STK17355290
    CATHODE OPTIONSCATHODE REPELLER,THREADCOVER1 EA17121930
    SOURCE MOUNTING FLANGE   ASSEMBLYPLT SHIELD SCE1 EA17083680
    SOURCE MOUNTING FLANGE   ASSEMBLYSHIELD PLATE1 STK17122511
    SOURCE MOUNTING FLANGE   ASSEMBLYSOURCE SHIELD PLATE1 EA17338530
    SOURCE MOUNTING FLANGE   ASSEMBLYCATHODE ARC PLATE2 EA17037280
    SOURCE MOUNTING FLANGE   ASSEMBLYW CATHODE ARC PLATE2 EA
    SOURCE HOUSING ASSEMBLYSHIELD, CLAMP RING1 EA17128740
    SOURCE HOUSING ASSEMBLYSHIELD, SOURCE1 EA17139160
    HE EXTRACTION ASSEMBLY 1*ELECTRODE HV PLATE1 EA17125561
    HE EXTRACTION ASSEMBLY 1INSULATOR SHIELD, OUTER4 EA1711261
    HE EXTRACTION ASSEMBLY 1INSULATOR SHIELD, INNER4 EA1711262
    HE EXTRACTION ASSEMBLY 1SHIELD INSULATOR PROTECTOR2 EA1712400
    HE EXTRACTION ASSEMBLY 1FIELD RING1 EA17037730
    HE EXTRACTION ASSEMBLY 1ELECTRODE SPACER3 EA1712390
    HE EXTRACTION ASSEMBLY 1*GROUND ELECTRODE1 EA17125571
    HE EXTRACTION ASSEMBLY 1CERAMIC STANDOFF4 STK2866042
    HE EXTRACTION ASSEMBLY 1*HE ELECTRODE1 EA17089711