| Category | Description | Qty | OEM No. |
| PURION H SOURCE ASSEMBLY | GRAPHITE CL1NTXT SHIELD ARC | 1 STK | 170163678 |
| PURION H SOURCE ASSEMBLY | RETAINING ROD | 4 STK | 170009150 |
| PURION H SOURCE ASSEMBLY | ARC SLIT 78MM X 5MM ELLIPTICAL | 1 STK | 170164133 |
| PURION H SOURCE ASSEMBLY | RETAINING ROD, 80MM | 4 STK | 170003740 |
| PURION H SOURCE ASSEMBLY | LINER, REAR, ARC CHAMBER | 1 STK | 170163578 |
| PURION H SOURCE ASSEMBLY | LINER SIDE ARC CHAMBER TUN VAP | 1 STK | 170163577 |
| PURION H SOURCE ASSEMBLY | REPELLER ARC CHAMBER W SEAL | 1 STK | 170163802 |
| PURION H SOURCE ASSEMBLY | SHIELD 2 REPELLER INSULATOR | 1 STK | 170115880 |
| PURION H SOURCE ASSEMBLY | SHIELD 1 REPELLER INSULATOR | 1 STK | 170115870 |
| PURION H SOURCE ASSEMBLY | SST FLHSO .750LG | 1 STK | 4400201 |
| PURION H SOURCE ASSEMBLY | SHCS, #6-32 X .375, VNT, SST | 6 STK | 4400100 |
| PURION H SOURCE ASSEMBLY | CLAMP, REPELLER | 1 EA | 170056040 |
| PURION H SOURCE ASSEMBLY | SCREW, 6-32, .625LG, MO | 8 STK | 17389000 |
| PURION H SOURCE ASSEMBLY | SEAL REPELLER ARC CHAMBER | 2 STK | 170163679 |
| PURION H SOURCE ASSEMBLY | INSULATOR REPELLER LARGER | 1 STK | 170164535 |
| PURION H SOURCE ASSEMBLY | SST, 6-32 SCREW, SHC, .500 LG, MOS2 | 2 EA | 4400100 |
| PURION H SOURCE ASSEMBLY | 4-40 SET SCREW - .093LG | 2 STK | 4400677 |
| PURION H SOURCE ASSEMBLY | PLATE CONTACT REPELLER | 1 STK | 170116980 |
| PURION H SOURCE ASSEMBLY | NUT PLATE, MOLY ELS | 2 EA | 17384080 |
| PURION H SOURCE ASSEMBLY | GPH STD NTXT PLUG GAS ARC | 1 STK | 170057060 |
| PURION H SOURCE ASSEMBLY | 440, SHCS, .250, SST, VENTED | 3 EA | 4400424 |
| PURION H SOURCE ASSEMBLY | HEAT SHIELD ARC CHAMBER | 1 STK | 170036460 |
| PURION H SOURCE ASSEMBLY | BLOCK SUPPORT ARC CHAMBER | 1 STK | 170037490 |
| PURION H SOURCE ASSEMBLY | MOUNT PLATE ARC CHAMBER | 1 STK | 170117670 |
| PURION H SOURCE ASSEMBLY | SST,VENTED SET SCREW, #6-32X0.375 | 1 STK | 17C2983 |
| PURION H SOURCE ASSEMBLY | CONNECTOR HV CATHODE ARC | 1 STK | 170036380 |
| PURION H SOURCE ASSEMBLY | *BALL JOINT | 1 EA | 17033160 |
| PURION H SOURCE ASSEMBLY | .360 OD X 1.75LG X .032 WIRE COMPR | 1 STK | 400000277 |
| PURION H SOURCE ASSEMBLY | GAS LINE RETAINER FLANGE | 1 STK | 170042000 |
| PURION H SOURCE ASSEMBLY | GAS LINE SOURCE | 1 STK | 170036510 |
| PURION H SOURCE ASSEMBLY | SLEEVE RETAINER, GAS LINE | 1 STK | 170036500 |
| PURION H SOURCE ASSEMBLY | SOCKET JOINT | 1 EA | 17033150 |
| PURION H SOURCE ASSEMBLY | SHCS SIL PLTD .188LG | 2 EA | 4400632 |
| PURION H SOURCE ASSEMBLY | STRAP HV CATHODE ARC CHAMBER | 1 STK | 170036400 |
| PURION H SOURCE ASSEMBLY | REPELLER INSULATOR | 1 STK | 17E9158 |
| PURION H SOURCE ASSEMBLY | REPELLER INSULATOR COVER | 1 STK | 17D8110 |
| PURION H SOURCE ASSEMBLY | WASHER, SPLT LOCK | 1 EA | 4400034 |
| PURION H SOURCE ASSEMBLY | GCC GRAPHITE PLATE MOUNTING | 1 STK | 170037800 |
| PURION H SOURCE ASSEMBLY | FILAMENT FEED STRAP SOURCE | 2 STK | 170001910 |
| PURION H SOURCE ASSEMBLY | SST BHCS #10-32 UNF, .250 LG | 4 EA |
|
| PURION H SOURCE ASSEMBLY | SPCR TOOL POSN FILAMENT ELS4 | 1 STK | 170164006 |
| PURION H SOURCE ASSEMBLY | WASHER, SST FLAT | 4 EA | 4400370 |
| PURION H SOURCE ASSEMBLY | FILAMENT CLAMP | 2 STK | 170077640 |
| PURION H SOURCE ASSEMBLY | FILAMENT ELS-4 | 1 STK | 170166669 |
| PURION H SOURCE ASSEMBLY | CATHODE ELS4 | 1 STK | 170163984 |
| PURION H SOURCE ASSEMBLY | SST SHCS .625LG | 2 EA | 17389000 |
| PURION H SOURCE ASSEMBLY | INSULATOR CATHODE PLATE | 1 STK | 170164947 |
| PURION H SOURCE ASSEMBLY | SHLD CATHODE SEAL REDUCED ID | 2 STK | 170163668 |
| PURION H SOURCE ASSEMBLY | SHIELD CATHODE TUNGSTEN CUP | 1 STK | 170163410 |
| PURION H SOURCE ASSEMBLY | SST FLAT WASHER | 3 EA | 460000105 |
| PURION H SOURCE ASSEMBLY | ARC CHAMBER TUNGSTEN 80MM | 1 STK | 170151458 |
| PURION H SOURCE ASSEMBLY | CATHODE LINER TUNGSTEN | 1 STK | 170152090 |
| PURION H SOURCE ASSEMBLY | NUT MO SQUARES 6-32 | 4 STK | 170039150 |
| PURION H SOURCE ASSEMBLY | LINER TOP ARC CHAMBER TUNGSTEN | 1 STK | 170163411 |
| PURION H SOURCE ASSEMBLY | LINER SIDE ARC CHAMBER TUNGSTEN | 1 STK | 170163576 |
| PURION H SOURCE ASSEMBLY | LINER BOTTOM ARC CHAMBER W | 1 STK | 170163113 |
| PURION H SOURCE ASSEMBLY | SPRING, COMPRESSION COIL | 8 EA | 40S0348 |
| PURION H SOURCE ASSEMBLY | RETAINING RING, E-TYPE | 12 EA | 4300031 |
| PURION H200 SOURCE ASSEMBLY | GRAPHITE CL1NTXT SHIELD ARC | 1 STK | 170163678 |
| PURION H200 SOURCE ASSEMBLY | ARC SLIT 78MM X 5MM ELLIPTICAL | 1 STK | 170164133 |
| PURION H200 SOURCE ASSEMBLY | LINER SIDE ARC CHAMBER TUN VAP | 1 STK | 170163577 |
| PURION H200 SOURCE ASSEMBLY | LINER TOP ARC CHAMBER TUNGSTEN | 1 STK | 170163411 |
| PURION H200 SOURCE ASSEMBLY | LINER SIDE ARC CHAMBER TUNGSTEN | 1 STK | 170163576 |
| PURION H200 SOURCE ASSEMBLY | LINER, REAR, ARC CHAMBER | 1 STK | 170163578 |
| PURION H200 SOURCE ASSEMBLY | SHIELD CATHODE TUNGSTEN CUP | 1 STK | 170163410 |
| PURION H200 SOURCE ASSEMBLY | CATHODE LINER TUNGSTEN | 1 STK | 170174465 |
| PURION H200 SOURCE ASSEMBLY | SHLD CATHODE SEAL REDUCED ID | 2 STK | 170163668 |
| PURION H200 SOURCE ASSEMBLY | SCREW, 6-32, .625LG, MO | 2 STK | 17389000 |
| PURION H200 SOURCE ASSEMBLY | GPH STD NTXT PLUG GAS ARC | 1 STK | 170057060 |
| PURION H200 SOURCE ASSEMBLY | HEAT SHIELD ARC CHAMBER | 1 STK | 170036460 |
| PURION H200 SOURCE ASSEMBLY | SCREW, 10-32, SHCSV, 375, S | 4 EA | 4400743 |
| PURION H200 SOURCE ASSEMBLY | RETAINING ROD, 80MM | 4 STK | 170003740 |
| PURION H200 SOURCE ASSEMBLY | SPRING, COMPRESSION COIL | 4 EA | 40S0348 |
| PURION H200 SOURCE ASSEMBLY | RETAINING RING, E-TYPE | 8 EA | 4300031 |
| PURION H200 SOURCE ASSEMBLY | STRAP HV CATHODE ARC CHAMBER | 1 STK | 170036400 |
| PURION H200 SOURCE ASSEMBLY | SHCS SIL PLTD .188LG | 1 EA | 4400632 |
| PURION H200 SOURCE ASSEMBLY | LINER BOTTOM ARC CHAMBER W | 1 STK | 170163113 |
| PURION H200 SOURCE ASSEMBLY | NUT MO SQUARES 6-32 | 4 STK | 170039150 |
| PURION H200 SOURCE ASSEMBLY | ARC CHAMBER TUNGSTEN 80MM | 1 STK | 170151458 |
| PURION H200 SOURCE ASSEMBLY | SEAL REPELLER ARC CHAMBER | 2 STK | 170163679 |
| PURION H200 SOURCE ASSEMBLY | REPELLER ARC CHAMBER W SEAL | 1 STK | 170163802 |
| PURION H200 SOURCE ASSEMBLY | SHIELD 1 REPELLER INSULATOR | 1 STK | 170115870 |
| PURION H200 SOURCE ASSEMBLY | CLAMP, REPELLER | 1.000 ST | 170056040 |
| PURION H200 SOURCE ASSEMBLY | SST FLHSO .750LG | 1 STK | 4400201 |
| PURION H200 SOURCE ASSEMBLY | SHIELD 2 REPELLER INSULATOR | 1 STK | 170115880 |
| PURION H200 SOURCE ASSEMBLY | INSULATOR REPELLER LARGER | 1 STK | 170164535 |
| PURION H200 SOURCE ASSEMBLY | PLATE CONTACT REPELLER | 1 STK | 170116980 |
| PURION H200 SOURCE ASSEMBLY | 4-40 SET SCREW - .093LG | 2 STK | 4400677 |
| PURION H200 SOURCE ASSEMBLY | SST, 6-32 SCREW, SHC, .500 LG, MOS2 | 4 EA | 4400100 |
| PURION H200 SOURCE ASSEMBLY | NUT PLATE, MOLY ELS | 1 EA | 17384080 |
| PURION H200 SOURCE ASSEMBLY | 440, SHCS, .250, SST, VENTED | 3 EA | 4400424 |
| PURION H200 SOURCE ASSEMBLY | SST FLAT WASHER | 3 EA | 460000105 |
| PURION H200 SOURCE ASSEMBLY | SET SCREW MOLYBDENUM | 1 STK | 17C2983 |
| PURION H200 SOURCE ASSEMBLY | COVER. INSULATOR | 1 EA | 17D8110 |
| PURION H200 SOURCE ASSEMBLY | INSULATOR, REPELLER | 1 EA | 17E9158 |
| PURION H200 SOURCE ASSEMBLY | CONNECTOR HV CATHODE ARC | 1 STK | 170036380 |
| PURION H200 SOURCE ASSEMBLY | WASHER, SPLT LOCK | 1 EA | 4400034 |
| ASSY CATHODE SUPPORT ELS4 | INSULATOR CATHODE AND FILAMENT | 1 STK | 170169766 |
| ASSY CATHODE SUPPORT ELS4 | SAMPLE NEEDED FOR PART ANALYSIS | 1 STK | 17388990 |
| ASSY CATHODE SUPPORT ELS4 | NUT PLATE, MOLY ELS | 2 EA | 4400061 |
| ASSY CATHODE SUPPORT ELS4 | SST SHCS .625LG | 2 EA | 4400061 |
| ASSY CATHODE SUPPORT ELS4 | SAMPLE NEEDED FOR PART ANALYSIS | 1 STK | 170164006 |
| ASSY CATHODE SUPPORT ELS4 | FILAMENT ELS-4 | 1 STK | 400001626 |
| ASSY CATHODE SUPPORT ELS4 | GCC GRAPHITE PLATE MOUNTING | 1 STK | 170037800 |
| ASSY CATHODE SUPPORT ELS4 | SAMPLE NEEDED FOR PART ANALYSIS | 2 STK | 170059030 |
| ASSY CATHODE SUPPORT ELS4 | WASHER, SPLT LOCK | 4 EA | 4400034 |
| ASSY CATHODE SUPPORT ELS4 | SAMPLE NEEDED FOR PART ANALYSIS | 4 STK | 170171171 |
| ASSY CATHODE SUPPORT ELS4 | SCREW, SST BHCS .375LG | 4 EA | 170056600 |
| ASSY CATHODE SUPPORT ELS4 | FILAMENT FEED STRAP SOURCE | 2 STK | 170001910 |
| ASSY CATHODE SUPPORT ELS4 | SAMPLE NEEDED FOR PART ANALYSIS | 2 STK | 170173343 |
| ASSY CATHODE SUPPORT ELS4 | SAMPLE NEEDED FOR PART ANALYSIS | 2 STK | 4400016 |
| PURION H EXTRACTION ASSEMBLY | ADAPTER SCE ELE HEAD NON- | 1 STK | 170160827 |
| PURION H EXTRACTION ASSEMBLY | SST FHSV .625 LG | 3 EA | 4400690 |
| PURION H EXTRACTION ASSEMBLY | PLATE GND ELECTRODE NON- | 1 STK | 170160818 |
| PURION H EXTRACTION ASSEMBLY | GPH CL2NTXT BASE ELECTRODE GND | 2 STK | 170164869 |
| PURION H EXTRACTION ASSEMBLY | 6-32 BHCSO, VENTED, .500LG | 4 STK | 4400431 |
| PURION H EXTRACTION ASSEMBLY | ELECTD GND INCREASED GAP .75 | 2 STK | 170164870 |
| PURION H EXTRACTION ASSEMBLY | SPRT BLOCK GROUND PIN | 2 STK | 170030060 |
| PURION H EXTRACTION ASSEMBLY | SPRT BLOCK GROUND PIN | 1 STK | 170161721 |
| PURION H EXTRACTION ASSEMBLY | SST, FLAT HEAD, 4-40, .625 LG VENTED | 4 STK | 440001496 |
| PURION H EXTRACTION ASSEMBLY | HSCR-4-40-FLHSO-313-S | 2 EA | 44S0210 |
| PURION H EXTRACTION ASSEMBLY | SCREW, 6-32, PAN HEAD SLTD, .500 LG | 8 STK | 450001290 |
| PURION H EXTRACTION ASSEMBLY | 1-32 BUTTON HEAD SCREW 313LG | 4 STK | 4401101 |
| PURION H EXTRACTION ASSEMBLY | GPH BASE ELECTD. SUPP INSERT | 1 STK | 170162397 |
| PURION H EXTRACTION ASSEMBLY | ELECTD SUPPRESSION THIN | 2 STK | 170163839 |
| PURION H EXTRACTION ASSEMBLY | SST WASHER, FLAT, #6 SP | 8 EA | 460000116 |
| PURION H EXTRACTION ASSEMBLY | SST FLHSO .500 LG | 4 STK | 697100066208 |
| PURION H EXTRACTION ASSEMBLY | PLATE SUPPR ELECTRODE NON- | 1 STK | 170160817 |
| PURION H EXTRACTION ASSEMBLY | SHIELD INNER INSULATOR | 2 STK | 170160840 |
| PURION H EXTRACTION ASSEMBLY | INSULATOR ELECT HEAD SELF | 2 STK | 170163511 |
| PURION H EXTRACTION ASSEMBLY | SHIELD OUTER INSULATOR | 2 STK | 170160841 |
| PURION H EXTRACTION ASSEMBLY | GRAPHITE CL2NTXT ELECTRODE | 2 STK | 170162393 |
| PURION H200 EXTRACTION ASSEMBLY | GPH CL1NTXT ADAPTER SOURCE | 1 STK | 170168776 |
| PURION H200 EXTRACTION ASSEMBLY | SST FHSV .625 LG | 3 EA | 4400690 |
| PURION H200 EXTRACTION ASSEMBLY | PLATE GND ELECTRODE NON- | 1 STK | 170160818 |
| PURION H200 EXTRACTION ASSEMBLY | GPH CL2NTXT BASE ELECTRODE GND | 2 STK | 170164869 |
| PURION H200 EXTRACTION ASSEMBLY | SST BHCS .500LG | 4 EA | 4400431 |
| PURION H200 EXTRACTION ASSEMBLY | ELECTD GND INCREASED GAP .75 | 2 STK | 170164870 |
| PURION H200 EXTRACTION ASSEMBLY | SAMPLE NEEDED FOR PART ANALYSIS | 1 STK | 170171658 |
| PURION H200 EXTRACTION ASSEMBLY | HSCR-4-40-FLHSO-313-S | 2 EA | 44S0210 |
| PURION H200 EXTRACTION ASSEMBLY | SCREW, 6-32, PAN HEAD SLTD, .500 LG | 8 STK | 450001290 |
| PURION H200 EXTRACTION ASSEMBLY | 1-32 BUTTON HEAD SCREW 313LG | 4 STK | 4401101 |
| PURION H200 EXTRACTION ASSEMBLY | GPH BASE ELECTD. SUPP INSERT | 2 STK | 170162397 |
| PURION H200 EXTRACTION ASSEMBLY | ELECTD SUPPRESSION THIN | 2 STK | 170163839 |
| PURION H200 EXTRACTION ASSEMBLY | SST WASHER, FLAT, #6 SP | 4 EA | 460000116 |
| PURION H200 EXTRACTION ASSEMBLY | SST FLHSO .500 LG | 1 STK | 697100066208 |
| PURION H200 EXTRACTION ASSEMBLY | PLATE SUPPR ELECTRODE NON- | 1 STK | 170160817 |
| PURION H200 EXTRACTION ASSEMBLY | SHIELD INNER INSULATOR | 2 STK | 170160840 |
| PURION H200 EXTRACTION ASSEMBLY | INSULATOR ELECT HEAD SELF | 2 STK | 170163511 |
| PURION H200 EXTRACTION ASSEMBLY | SHIELD OUTER INSULATOR | 2 STK | 170160841 |
| PURION H200 EXTRACTION ASSEMBLY | GRAPHITE CL2NTXT ELECTRODE | 2 STK | 170162393 |
| PURION H200 EXTRACTION ASSEMBLY | SLEEVE ELECTRODE HEAD | 1 STK | 170168625 |
| PURION H200 EXTRACTION ASSEMBLY | SCREW M3 X 8 FL/H/HEX/SC/MM SST NF | 2 STK | 440001246 |
| KIT, LINER, AMU BEAMGUIDE | PLATE STRIKE NEUTRAL | 1 STK | 170157204 |
| KIT, LINER, AMU BEAMGUIDE | LINER 3 BEAM RIGHT | 1 STK | 170161529 |
| KIT, LINER, AMU BEAMGUIDE | LINER BEAM DUMP TOP | 1 STK | 170157233 |
| KIT, LINER, AMU BEAMGUIDE | KEEPER GRAPHITE LINER | 1 STK | 170157231 |
| KIT, LINER, AMU BEAMGUIDE | LINER 1 BEAMGUIDE TOP | 3 STK | 170156927 |
| KIT, LINER, AMU BEAMGUIDE | LINER 2 BEAMGUIDE TOP | 1 STK | 170157231 |
| KIT, LINER, AMU BEAMGUIDE | GRAPHITE CL1TXT LINER 3 BEAMGUIDE | 1 STK | 170164638 |
| KIT, LINER, AMU BEAMGUIDE | LINER 2 BEAM RIGHT | 1 STK | 170167202 |
| KIT, LINER, AMU BEAMGUIDE | GRAPHITE CL1NTXT AMU ENTRANCE | 1 STK | 170164848 |
| KIT, LINER, AMU BEAMGUIDE | GPH AXL-83P NTXT STRIKE 1 INNER | 1 STK | 170167331 |
| KIT, LINER, AMU BEAMGUIDE | GRAPHITE AXL-83P NTXT STRIKE 2 | 1 STK | 170167333 |
| KIT, LINER, AMU BEAMGUIDE | GRAPH AXL-83P NTXT STRIKE 1 OUTER | 1 STK | 170167336 |
| KIT, LINER, AMU BEAMGUIDE | GRAPH AXL-83P NTXT STRIKE 2 OUTER | 1 STK | 170167334 |
| ASSY, AMU ENTRANCE LINER 2 | GRAPHITE CL1NTXT AMU ENTRANCE | 2 STK | 170164850 |
| ASSY, AMU ENTRANCE LINER 2 | GRAPHITE CL1NTXT AMU ENTRANCE | 2 STK | 170164849 |
| ASSY, AMU ENTRANCE LINER 2 | GRAPH CL1NTXT AMU ENTRANCE | 1 STK | 170164851 |
| ASSY, AMU ENTRANCE LINER 2 | SOCKET FLAT HEAD SCREWS SFH- | 8 STK | 440001246 |
| ASSY, BEAM GUIDE, LINER EXIT | GRAPHITE AXL-83P NTXT LINER AMU | 1 STK | 170171312 |
| ASSY, BEAM GUIDE, LINER EXIT | GRAPH AXL-83P NTXT LINER AMU EXIT | 1 STK | 170173220 |
| ASSY, BEAM GUIDE, LINER EXIT | GRAPH AXL-83P NTXT LINER AMU EXIT | 1 STK | 170171310 |
| ASSY, BEAM GUIDE, LINER EXIT | SAMPLE NEEDED FOR PART ANALYSIS | 1 STK | 170171311 |
