| Category | Plansee No. | Description | Qty | OEM No. |
| PURION XE SOURCE ASSEMBLY | 12098545 | ARC SLIT | 1 STK | 170150599 |
| PURION XE SOURCE ASSEMBLY | 12520496 | RETAINING ROD, PURION M | 4 STK | 170009150 |
| PURION XE SOURCE ASSEMBLY | 11629904 | RETAINING RING, E-TYPE | 4 EA | 4300031 |
| PURION XE SOURCE ASSEMBLY | 12612442 | PLATE CLAMP FRONT, ARC SLIT | 1 STK | 170156070 |
| PURION XE SOURCE ASSEMBLY | 12616913 | PLATE CLAMP FRONT, ARC SLIT | 1 STK |
|
| PURION XE SOURCE ASSEMBLY | 12616476 | FRONT STOCK PLATE, ARC SLIT | 1 STK | 170164512 |
| PURION XE SOURCE ASSEMBLY | 15124664 | FRONT STOCK PLATE, ARC SLIT, REV, | 1 STK |
|
| PURION XE SOURCE ASSEMBLY | 12612444 | FRONT STOCK PLATE, ARC SLIT | 1 STK | 170165335 |
| PURION XE SOURCE ASSEMBLY | 11381796 | INSULATING BUSHING | 1 STK | 1708680 |
| PURION XE SOURCE ASSEMBLY | 12098557 | CUP SHIELD | 1 STK | 170158533 |
| PURION XE SOURCE ASSEMBLY | 12368256 | INSULATOR REPELLER | 1 STK | 170158532 |
| PURION XE SOURCE ASSEMBLY | 11636675 | REPELLER | 1 EA | 17294320 |
| PURION XE SOURCE ASSEMBLY | 12599546 | MOUNT, ARC CHAMBER, REPELLER | 1 STK | 170151060 |
| PURION XE SOURCE ASSEMBLY | 12613015 | MOUNT ARC CHAMBER CATHODE SIDE, | 1 STK | 170151061 |
| PURION XE SOURCE ASSEMBLY | 11633022 | FLANGE SEAL | 3 EA | 17287680 |
| PURION XE SOURCE ASSEMBLY | 11632994 | BALL SEAL, CERAMIC | 3 EA | 17287690 |
| PURION XE SOURCE ASSEMBLY | 11370458 | SPRING COMPRESSION SOURCE | 3 STK | 17270640 |
| PURION XE SOURCE ASSEMBLY | 12098560 | ARC CHAMBER W | 1 STK | 170150575 |
| PURION XE SOURCE ASSEMBLY | 12282163 | HEAT SHIELD | 1 STK | 170109520 |
| PURION XE SOURCE ASSEMBLY | 12098541 | PLATE | 1 STK | 170035580 |
| PURION XE SOURCE ASSEMBLY | 11628295 | SHCS, 6-32, .375LG, SST | 2 EA | 4400044 |
| PURION XE SOURCE ASSEMBLY | 11632829 | INSULATOR, CATHODE | 1 EA | 17287870 |
| PURION XE SOURCE ASSEMBLY | 11628304 | SST SHCS .625LG | 2 EA | 4400061 |
| PURION XE SOURCE ASSEMBLY | 11631979 | FILAMENT FEED STRAP | 2 EA | 17133300 |
| PURION XE SOURCE ASSEMBLY | 11631998 | SCREW, 10-32, SHCSV, 375, S | 2 EA | 4400743 |
| PURION XE SOURCE ASSEMBLY | 11628224 | SST LOCK WASHER | 2 EA | 4400041 |
| PURION XE SOURCE ASSEMBLY | 11628241 | WASHER, SST FLAT | 2 EA | 4400370 |
| PURION XE SOURCE ASSEMBLY | 11631971 | SST WASHER, FLAT, #8 SP | 4 EA | 4400122 |
| PURION XE SOURCE ASSEMBLY | 11633547 | SST BHCS .312LG | 4 EA | 4400747 |
| PURION XE SOURCE ASSEMBLY | 11587887 | W CLAMP, FILAMENT ELS | 2 STK |
|
| PURION XE SOURCE ASSEMBLY | 11370955 | CLAMP, FILAMENT ELS | 2 STK | 170035620 |
| PURION XE SOURCE ASSEMBLY | 11628300 | SST, 6-32 SCREW, SHC, .500 LG, MOS2 | 4 EA | 4400100 |
| PURION XE SOURCE ASSEMBLY | 11631968 | WASHER, SPLT LOCK | 6 EA | 4400034 |
| PURION XE SOURCE ASSEMBLY | 11636451 | SST BHCS .250LG | 1 EA | 4400008 |
| PURION XE SOURCE ASSEMBLY | 11628313 | 1ST FLAT WASHER | 1 EA | 4400059 |
| PURION XE SOURCE ASSEMBLY | 11632830 | CATHODE SUPPORT PLATE | 1 EA | 17287860 |
| PURION XE SOURCE ASSEMBLY | 11633345 | SUPPORT PLATE, REVERSIBLE | 1 EA |
|
| PURION XE SOURCE ASSEMBLY | 11631969 | SST WASHER, FLAT, #6 SP | 2 EA | 4400232 |
| PURION XE SOURCE ASSEMBLY | 11633317 | FILAMENT, ELS2 | 1 EA | 17287851 |
| PURION XE SOURCE ASSEMBLY | 11456984 | FILAMENT, ELS, ASSY | 1.000 ST |
|
| PURION XE SOURCE ASSEMBLY | 14474067 | CATHODE RING | 1 STK | 170158638 |
| PURION XE SOURCE ASSEMBLY | 12098555 | LINER CATHODE W ELS | 1 STK | 17308560 |
| PURION XE SOURCE ASSEMBLY | 12261037 | LINER CATHODE ELS | 1 STK |
|
| PURION XE SOURCE ASSEMBLY | 12368257 | LINER SIDE W ELS, VAP | 2 STK | 17308540 |
| PURION XE SOURCE ASSEMBLY | 12098554 | LINER SIDE W ELS | 2 STK | 170109340 |
| PURION XE SOURCE ASSEMBLY | 12261036 | LINER SIDE ELS | 2 STK |
|
| PURION XE SOURCE ASSEMBLY | 12098552 | LINER BOTTOM W ELS | 1 STK | 17308520 |
| PURION XE SOURCE ASSEMBLY | 12261035 | LINER BOTTOM ELS | 1 STK |
|
| PURION XE SOURCE ASSEMBLY | 11632369 | CATHODE REPELLER | 1 EA | 17133340 |
| PURION XE SOURCE ASSEMBLY | 12098551 | LINER REPELLER W ELS | 1 STK | 17308550 |
| PURION XE SOURCE ASSEMBLY | 12261034 | LINER REPELLER ELS | 1 STK |
|
| PURION XE SOURCE ASSEMBLY | 11636770 | CATHODE, ELS, CAN STYLE, SMALL DIA. | 1 EA | 170093650 |
| PURION XE SHIELD SOURCE FLANGE END | 12586753 | SHIELD SOURCE FLANGE END | 1 STK | 170108850 |
| PURION XE SHIELD SOURCE FLANGE END | 12587513 | SHIELD SRC MOUTING FLANGE | 1 STK | 170109530 |
| PURION SOURCE MOUNT COMPONENTS | 11549038 | SOURCE SUPPORT BLOCK | 1 STK | 17174120 |
| PURION SOURCE MOUNT COMPONENTS | 12271035 | 10-32 SOCKET HEAD SCREW, 1.00 LG | 4 STK | 4400022 |
| PURION SOURCE MOUNT COMPONENTS | 11370402 | COOLING TUBE | 1 STK | 17033360 |
| PURION SOURCE MOUNT COMPONENTS | 11565649 | T MODIFICATION | 1 STK | 1200850 |
| PURION SOURCE MOUNT COMPONENTS | 11370594 | FILAMENT FEED THROUGH | 1 STK | 17033021 |
| PURION SOURCE MOUNT COMPONENTS | 11382496 | CONNECTOR | 1 STK | 17033010 |
| PURION SOURCE MOUNT COMPONENTS | 11634269 | INSULATOR, FIL. FEEDTHRU | 1 EA | 17127840 |
| PURION SOURCE MOUNT COMPONENTS | 11370592 | FILAMENT FEED THROGH | 1 STK | 17033020 |
| PURION SOURCE MOUNT COMPONENTS | 11636882 | BHCS, 8-32, .375, MO COATED SST | 1 EA | 4400613 |
| PURION SOURCE MOUNT COMPONENTS | 11370408 | HEAT SHIELD HOLDER | 1 STK | 17033100 |
| PURION SOURCE MOUNT COMPONENTS | 11374742 | ~HEAT SHIELD ASSEMBLY | 2 STK | 1152240 |
| PURION SOURCE MOUNT COMPONENTS | 11372848 | SUS304 HEXAGON NAT 5/8-11UNC | 2 STK | 4400006 |
| PURION SOURCE MOUNT COMPONENTS | 11381278 | FILAMENT FEED THROUGH WASHER | 2 STK | 1700250 |
| PURION SOURCE MOUNT COMPONENTS | 11635467 | INSULATOR, FILAMENT FEEDTHRU | 2 EA | 17127830 |
| PURION SOURCE MOUNT COMPONENTS | 11635899 | INSULATOR, CATHODE WIRE | 1 EA | 17147310 |
| PURION SOURCE MOUNT COMPONENTS | 11633552 | CONN INLINE | 1 EA | 5101979 |
| PURION SOURCE MOUNT COMPONENTS | 14463045 | WASHER, SPLIT | 2 STK | 4400062 |
| PURION XE EXTRACTION ASSEMBLY | 11901697 | ELECTRODE | 1 STK | 170033320 |
| PURION XE EXTRACTION ASSEMBLY | 14994714 | PLATE SUPPRESSION | 1 STK | 170166376 |
| PURION XE EXTRACTION ASSEMBLY | 11867001 | COVER, EXTRACTION INSULATOR | 2 STK | 170007120 |
| PURION XE EXTRACTION ASSEMBLY | 12407796 | INSULATOR | 2 STK | 170165243 |
| PURION XE EXTRACTION ASSEMBLY | 11867002 | COVER, EXTRACTION INSULATOR | 2 STK | 170007130 |
| PURION XE EXTRACTION ASSEMBLY | 11901698 | LINER GROUND PLATE | 1 STK | 170033330 |
| PURION XE EXTRACTION ASSEMBLY | 12111173 | GROUND ELECTRODE CARRIER | 1 STK | 170073260 |
| PURION XE EXTRACTION ASSEMBLY | 14994711 | STANDOFF, MANIPULATOR | 4 STK | 170073220 |
| PURION XE EXTRACTION ASSEMBLY | 14996116 | BEAM SHIELD BOX | 1 STK | 170073230 |
| PURION XE EXTRACTION ASSEMBLY | 14994712 | BACK SUPPRESSION RING | 1 STK | 170073240 |
| PURION XE EXTRACTION ASSEMBLY | 14511450 | INSULATOR MOD | 2 STK |
|
| PURION XE EXTRACTION ASSEMBLY | 14426695 | GROUND CLN2NTXT GND ELECT. | 1 STK | 170165838 |
| GROUND ELECTRODE CARRIER OPTIONS | 12111173 | GROUND ELECTRODE CARRIER | 1 STK | 170073260 |
| GROUND ELECTRODE CARRIER OPTIONS | 14426695 | GROUND CLN2NTXT GND ELECT. | 1 STK | 170165838 |
| RESOLVING MASS SLIT | 12587158 | PLATE APERTURE MASS RESOLVING | 1 STK | 170151740 |
| PUMP EXTENSION 70 DEG MAGNET | 11901695 | LINER, EXIT | 1 STK | 170051610 |
| PUMP EXTENSION 70 DEG MAGNET | 12587177 | LINER CENTER VG PUMP HOUSING | 1 STK | 170051620 |
| PUMP EXTENSION 70 DEG MAGNET | 12587056 | LINER ENTRANCE VG-PUMP HOUSING | 1 STK | 170051630 |
| PUMP EXTENSION 70 DEG MAGNET | 11636263 | GRAPHITE SCREW | 2 EA | 17167970 |
| PUMP EXTENSION 70 DEG MAGNET | 12163538 | GRAPHITE SCREW | 2 STK |
|
| PURION XE PEF GRAPHITE | 12587066 | SHIELD PEF TOP | 1 STK | 170161703 |
| PURION XE PEF GRAPHITE | 12587018 | APERTURE PEF EXIT | 1 STK | 170162014 |
| PURION XE PEF GRAPHITE | 12586780 | SHIELD PEF FRONT | 1 STK | 170159906 |
| PURION XE FARADAY ASSY | 12599550 | FRONT SHIELD INST. FARADAY | 1 STK | 170031530 |
| PURION XE FARADAY ASSY | 12599551 | SHIELD BACKING FIXED APERTURE | 1 STK | 170078000 |
| PURION XE FARADAY ASSY | 12599554 | APERTURE GRAPHITE FIXED | 1 STK | 170077990 |
| PURION XE FARADAY ASSY | 12613020 | FILAMENT MOUNTING SCREW | 1 STK | 170155470 |
| PURION XE FARADAY ASSY | 12599548 | INSULATOR, FILAMENT | 1 STK | 17385700 |
| PURION XE FARADAY ASSY | 12599557 | BEAM STOP INST. FARADAY | 1 STK | 170030780 |
| PURION XE FARADAY ASSY | 12613013 | BLOCK BEAM STOP | 1 STK | 170152672 |
