| Category | Description | Qty | OEM No. |
| PURION M ION SOURCE | RETAINING ROD, PURION M | 4 STK | 170009150 |
| PURION M ION SOURCE | CATHODE REPELLER | 1 EA | 17133340 |
| PURION M ION SOURCE | CATHODE, ELS, CAN STYLE, SMALL DIA. | 1 EA | 170093650 |
| PURION M ION SOURCE | ARC CHAMBER W | 1 STK | 170150575 |
| PURION M ION SOURCE | ARC CHAMBER | 1 STK | 170151142 |
| PURION M ION SOURCE | LINER BOTTOM W ELS | 1 STK | 17308520 |
| PURION M ION SOURCE | LINER CATHODE W ELS | 1 STK | 17308560 |
| PURION M ION SOURCE | LINER SIDE W ELS, VAP | 2 STK | 17308540 |
| PURION M ION SOURCE | LINER SIDE W ELS | 2 STK | 170109340 |
| PURION M ION SOURCE | ARC SLIT HC, PURION M | 1 STK | 170150739 |
| PURION M ION SOURCE | ARC SLIT, PURION M | 1 STK | 170154590 |
| PURION M ION SOURCE | LINER REPELLER W ELS | 1 STK | 17308550 |
| PURION M ION SOURCE | FILAMENT INSULATOR | 1 EA | 1708680 |
| PURION M ION SOURCE | CUP SHIELD | 1 STK | 170158533 |
| PURION M ION SOURCE | INSULATOR REPELLER | 1 STK | 170158532 |
| PURION M ION SOURCE | REPELLER | 1 EA | 17294320 |
| PURION M-1 ION SOURCE | FILAMENT, ELS2 | 1.000 ST | 17287851 |
| PURION M-1 ION SOURCE | GCC GRAPHITE PLATE MOUNTING | 1 STK | 170037800 |
| PURION M-1 ION SOURCE | CATHODE, ELS, CAN STYLE, SMALL DIA. | 1 EA | 170093650 |
| PURION M-1 ION SOURCE | SHLD CATHODE TUNGSTEN CUP | 1 STK | 170164933 |
| PURION M-1 ION SOURCE | SEAL CATHODE TWO PIECE | 2 STK | 170158782 |
| PURION M-1 ION SOURCE | INSERT CATHODE HOLE ELS | 1 STK | 170158783 |
| PURION M-1 ION SOURCE | LINER CATHODE ELS | 1 STK | 170158780 |
| PURION M-1 ION SOURCE | ARC SLIT TUNGSTEN ELS | 1 STK | 170158894 |
| PURION M-1 ION SOURCE | LINER REPELLER ELS | 1 STK | 170166900 |
| PURION M-1 ION SOURCE | GRAPHITE STDTXT SPACER LINER | 1.000 ST | 170056040 |
| PURION M-1 ION SOURCE | LINER SIDE ELS | 2 STK | 170009150 |
| PURION M-1 ION SOURCE | LINER BACK ELS | 1 STK | 170158783 |
| PURION M-1 ION SOURCE | SEAL REPELLER ARC CHAMBER | 2 STK | 170164938 |
| PURION M-1 ION SOURCE | CLAMP, REPELLER | 1.000 ST | 170056040 |
| PURION M-1 ION SOURCE | SPRT INSULATING REPELLER | 1 STK | 170157795 |
| PURION M-1 ION SOURCE | REPELLER TUNGSTEN 19.05 MM MOD | 1 STK | 170164932 |
| PURION M-1 ION SOURCE | RETAINING ROD, PURION M | 2 STK | 170009150 |
| PURION M-1 ION SOURCE | STDNTXT CHAMBER ARC ELS | 1 STK | 170166900 |
| PURION M-1 ION SOURCE | FLANGE SEAL | 3 EA | 17287680 |
| PURION M-1 ION SOURCE | BALL SEAL, CERAMIC | 3 EA | 17287690 |
| PURION M-1 ION SOURCE | GRAPHITE STDNTXT VAPORIZER | 2 STK | 170164309 |
| PURION M-1 ION SOURCE | SPRING COMPRESSION SOURCE | 3 STK | 17270640 |
| PURION M-1 ION SOURCE | NUT PLATE, MOLY ELS | 1 EA | 17384080 |
| PURION M-1 ION SOURCE | FILAMENT FEED STRAP | 2 EA | 17133300 |
| PURION M-1 ION SOURCE | CATHODE WIRE | 1 EA | 17156990 |
| PURION SOURCE MOUNT COMPONENTS | SOURCE SUPPORT BLOCK | 1 STK | 17174120 |
| PURION SOURCE MOUNT COMPONENTS | 10-32 SOCKET HEAD SCREW, 1.00 LG | 4 STK | 4400022 |
| PURION SOURCE MOUNT COMPONENTS | COOLING TUBE | 1 STK | 17033360 |
| PURION SOURCE MOUNT COMPONENTS | T MODIFICATION | 1 STK | 1200850 |
| PURION SOURCE MOUNT COMPONENTS | FILAMENT FEED THROUGH | 1 STK | 17033021 |
| PURION SOURCE MOUNT COMPONENTS | CONNECTOR | 1 STK | 17033010 |
| PURION SOURCE MOUNT COMPONENTS | INSULATOR, FIL. FEEDTHRU | 1 EA | 17127840 |
| PURION SOURCE MOUNT COMPONENTS | FILAMENT FEED THROGH | 1 STK | 17033020 |
| PURION SOURCE MOUNT COMPONENTS | BHCS, 8-32, .375, MO COATED SST | 1 EA | 4400613 |
| PURION SOURCE MOUNT COMPONENTS | HEAT SHIELD HOLDER | 1 STK | 17033100 |
| PURION SOURCE MOUNT COMPONENTS | SUS304 HEXAGON NAT 5/8-11UNC | 2 STK | 4400006 |
| PURION SOURCE MOUNT COMPONENTS | FILAMENT FEED THROUGH WASHER | 2 STK | 1700250 |
| PURION SOURCE MOUNT COMPONENTS | INSULATOR, FILAMENT FEEDTHRU | 2 EA | 17127830 |
| PURION SOURCE MOUNT COMPONENTS | INSULATOR, CATHODE WIRE | 1 EA | 17147310 |
| PURION SOURCE MOUNT COMPONENTS | CONN INLINE | 1 EA | 5101979 |
| PURION SOURCE MOUNT COMPONENTS | WASHER, SPLIT | 2 STK | 4400062 |
