| Category | Description | Qty | OEM No. |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | RETAINER, FRONT PLATE | 1 STK | 002098908 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | WL RETAINER FRONT PLATE | 1 EA | 002098908 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | FRONT PLATE HALF | 2 EA | 002084219 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | FRONT PLATE, HALF, TUNGSTEN | 2 EA | 208400201 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | LINER, SIDE | 2 STK | 002098917 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | LINER, BASE | 1 EA | 002098916 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | LINER,END,ANTI-CATHODE | 1 EA | 002080181 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | ANTI-CATHODE,W,MODIFIED SHAFT | 1 EA | 002081482 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | STRAP, LINK, ANTICATHODE | 1 EA | 002084898 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | SUPPORT BAR, ANTI-CATHODE | 1 EA | 002080070 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | ARC CHAMBER BERNAS | 1 EA | 002081224 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | SHIELD, INSULATOR | 6 EA | 002085362 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | INSULATOR W/HELICOIL | 6 EA | 002097557 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | SUPPORT, ARC CHAMBER, LOWER | 1 STK | 002098900 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | SLEEVE, OVEN NOZZLE | 2 EA | 002081226 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | PLUG, ARC CHAMBER, SDS | 1 EA | 002085074 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | SUPPORT, ARC CHAMBER, UPPER | 1 STK | 000208899 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | E-CLIP TO SUIT M4 SHFT SS | 4 EA | 069090188 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | COMPRESSION SPRING | 4 EA | 378090110 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | SST WASHER, FLAT, M4 | 4 EA | 388090021 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | PIN, RETAINING | 4 EA | 002096040 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | STRAP, ION SOURCE | 2 EA | 002098902 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | CLAMP, FILAMENT, R/H | 1000 ST | 004094018 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | CLAMP, FILAMENT, L/H | 1000 ST | 002081227 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | THUMBSCREW, M4 | 6 EA | 002098911 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | COLLET,FILAMENT CLAMP | 2 STK | 002098580 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | SOCKET HEAD CAP SCREW, M4X.7 X | 2 EA | 002098581 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | REFLECTOR, FILAMENT | 2 STK | 002098914 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | REFLECTOR, FILAMENT Φ 15 | 2 STK | 002098914 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | REFLECTOR, FILAMENT Φ 13 | 2 STK |
|
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | REFLECTOR FILAMENT | 2 STK |
|
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | WL10 FORMTEIL 46.801/001 | 2 EA |
|
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | FILAMENT, ARC, CHAM, DIA 2.4 | 1 EA | 002082135 |
| 9500 - XR BERNAS ION SOURCE CONSUMABLES | LINER, END, FILAMENT | 1 EA | 002080180 |
| BERNAS FRONT PLATES | FRONT PLATE HALF | 1 EA | 002084219 |
| BERNAS FRONT PLATES | FRONT PLATE HALF | 1 EA | 002082027 |
| BERNAS FRONT PLATES | FRONT PLATE, HALF, TUNGSTEN | 1 EA | 002084201 |
| BERNAS FRONT PLATES | FRONT PLATE,INSERT ､ GP ､ RADIUSED | 1 EA | 002081342 |
| BERNAS FRONT PLATES | FRONT PLATE,INSERT,GP RADIUSED | 1 STK |
|
| BERNAS FRONT PLATES | FRONT PLATE, BERNAS, ONE PIECE | 1 EA |
|
| BERNAS FRONT PLATES | FRONT PLATE, BERNAS, ONE PIECE | 1 EA |
|
| 9500 - XR IHC ION SOURCE CONSUMABLES | RETAINER, FRONT PLATE | 1 STK | 002084744 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | FRONT PLATE, L/H, GPH | 1 EA | 002084907 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | FRONT PLATE, R/H, GPH | 1 EA | 002084743 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | LINER, SIDE, W | 2000 ST | 002086738 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | LINER, END ANTI-CATHODE | 1 EA | 002086740 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | ANTI-CATHODE,W,MODIFIED SHAFT | 1 EA | 002081482 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | SUPPORT BAR, ANTI-CATHODE | 1 EA | 002080070 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | THUMBSCREW,M4,CAPTIVE | 6 STK | 002098911 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | SHIELD, INSULATOR | 1 EA | 002085362 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | INSULATOR W/HELICOIL | 8 EA | 002097557 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | ARC CHAM INDIRECT | 1 EA | 002086736 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | PLUG, ARC CHAMBER, SDS | 2 EA | 002085074 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | SLEEVE, OVEN NOZZLE | 1 EA | 002081226 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | LINER, BASE, W | 1000 ST | 002086737 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | E-CLIP TO SUIT M4 SHFT SS | 4 EA | 069090188 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | COMPRESSION SPRING | 4 EA | 378090110 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | SST WASHER, FLAT, M4 | 8 EA | 388090021 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | PIN, RETAINING | 4 EA | 002096040 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | SUPPORT BAR, CATHODE | 1 EA | 004096352 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | SHIELD, INSULATOR LONG | 4 EA | 002086933 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | FILAMENT CLAMP, L/H | 1 EA | 002086734 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | CAM RETAINER | 2 EA |
|
| 9500 - XR IHC ION SOURCE CONSUMABLES | CAM, FILAMENT CLAMP | 2 EA |
|
| 9500 - XR IHC ION SOURCE CONSUMABLES | FILAMENT CLAMP, R/H | 1 EA | 002086733 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | FILAMENT GUIDE | 2 EA | 002087508 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | FILAMENT, ARC CHAMBER, IHC | 1 EA | 002086735 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | W CATHODE, 3 MM BUTTON | 1 SA | 004096830 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | LINER, END CATHODE | 1 EA | 002089586 |
| 9500 - XR IHC ION SOURCE CONSUMABLES | SUPPORT, UPPER | 1 EA |
|
| XR / QUANTUM CATHODE OPTIONS | CATHODE, SLOTTED | 1 EA | 004047909 |
| XR / QUANTUM CATHODE OPTIONS | CATHODE SLOTTED | 1 EA |
|
| XR / QUANTUM CATHODE OPTIONS | W CATHODE, 3 MM BUTTON | 1 SA | 004096830 |
| XR / QUANTUM CATHODE OPTIONS | CATHODE 3MM BUTTON | 1 EA |
|
| XR / QUANTUM ION SOURCE LINERS | LINER, SIDE, W | 2 EA | 002086738 |
| XR / QUANTUM ION SOURCE LINERS | LINER, SIDE, WL | 2000 ST |
|
| XR / QUANTUM ION SOURCE LINERS | LINER,BASE | 1 STK | 002190352 |
| XR / QUANTUM ION SOURCE LINERS | LINER, BASE, W | 1000 ST | 002086737 |
| XR / QUANTUM ION SOURCE LINERS | LINER, BASE, W | 1 EA | 002025729 |
| XR / QUANTUM ION SOURCE LINERS | LINER, BASE, WL | 1 STK |
|
| XR / QUANTUM ION SOURCE LINERS | LINER, BASE, WL | 1000 ST |
|
| XR / QUANTUM ION SOURCE LINERS | LINER, END CATHODE | 1 EA | 002089586 |
| XR / QUANTUM ION SOURCE LINERS | LINER, END ANTI-CATHODE | 1 EA | 002086740 |
| XR / QUANTUM ION SOURCE LINERS | LINER, END, CATHODE | 1 STK | 002190405 |
| XR / QUANTUM ION SOURCE LINERS | LINER, END, ANTI-CATHODE | 1 STK | 002090404 |
| XR / QUANTUM ION SOURCE LINERS | LINER, END, CATHODE, TEX, W | 1000 ST | 002025777 |
| XR / QUANTUM ION SOURCE LINERS | LINER, END, ANTI-CATHODE, TEX, W | 1 EA | 002025733 |
| XR / QUANTUM ION SOURCE LINERS | LINER, END, CATHODE TUNGSTEN | 1 STK |
|
| XR / QUANTUM ION SOURCE LINERS | LINER, END, CATHODE, TEXT AND C- | 1 STK |
|
| XR / QUANTUM ION SOURCE LINERS | LINER, END, CATHODE, TEX, GPH | 1 EA |
|
| XR / QUANTUM ION SOURCE LINERS | LINER, END, ANTI-CATHODE, TEX, GPH | 1 EA |
|
| XR / QUANTUM ION SOURCE LINERS | LINER, END, CATHODE, TEX, WL | 1000 ST |
|
| XR / QUANTUM ION SOURCE LINERS | LINER, END, ANTI-CATHODE, TEX, WL | 1000 ST |
|
| IHC FRONT PLATES | FRONT PLATE, R/H, GPH | 1 EA | 002084743 |
| IHC FRONT PLATES | FRONT PLATE, L/H, GPH | 1 EA | 002084907 |
| IHC FRONT PLATES | FRONT PLATE, R/H, W | 1 STK | 002087683 |
| IHC FRONT PLATES | FRONT PLATE, L/H, W | 1 STK | 002087684 |
| IHC FRONT PLATES | FRONT PLATE, R/H | 1 STK | 002042113 |
| IHC FRONT PLATES | FRONT PLATE, L/H | 1 STK | 002042096 |
| IHC FRONT PLATES | FRONTPLATE-FEMALE | 1 STK | 002010328 |
| IHC FRONT PLATES | FRONTPLATE-MALE | 1 STK | 002010329 |
| IHC FRONT PLATES | FRONT PLATE, ONE PIECE, GPH | 1 EA |
|
| IHC FRONT PLATES | FRONT PLATE, ONE-PIECE, W | 1 EA | 019038568 |
| IHC FRONT PLATES | FRONT PLATE, ONE-PIECE, GPH, W/ | 1 EA |
|
| IHC FRONT PLATES | FRONT PLATE, ONE PIECE, W, W/SLIT | 1 EA |
|
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | SST FHS 1.575LG | 4 EA | 369090788 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | SCREW, 8-32, FHM, SOC, VENT, 5/16 | 3 EA | 369090967 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | MOUNTING, SUPP. ELECTRODE | 1 EA | 004094286 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | ELECTRODE SUPPRESSION | 1 EA | 002098788 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | SST BHCSV .315LG | 4 EA | 369090635 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | CERAMIC STANDOFF | 3 EA | 342090090 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | MOUNTING, GROUND ELECTRODE | 1 EA |
|
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | SST BHCSV .312LG | 5 EA | 369090968 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | GROUND ELECTRODE | 1 STK | 002098787 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | SPACER, GRAPHITE | 4 EA | 002083227 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | SUPPRESSION RING | 1 EA | 002097546 |
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | MOUNTING, SUPP. ELECTRODE | 1 EA |
|
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | ELECTRODE, SUPP. (MOD) | 1 EA |
|
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | CERAMIC STANDOFF | 3 STK |
|
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | MOUNTING, GROUND ELECTRODE | 1 EA |
|
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | ELECTRODE, GROUND MOD. | 1 EA |
|
| 9500 - XR SINGLE BELLOWS EXTRACTION ASSY | SUPPRESSION RING | 1 STK |
|
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | SST FHS 1.575LG | 4 EA | 369090788 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | SCREW, SST FH .394LG | 4 EA | 369091175 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | MOUNTING, SUPP. ELECTRODE | 1 EA | 002083974 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | SUPPRESSION ELECTRODE | 1 EA | 002084523 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | SST BHCSV .315LG | 4 EA | 369090635 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | MOUNT PLATE, GROUND ELEC. | 1 EA | 002084522 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | ELECTRODE, GROUND | 1 EA | 002083425 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | SPACER, GRAPHITE | 4 EA | 002083227 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | SUPPRESSION RING | 1 STK |
|
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | BRACKET, SUPPRESSION, ELECTRODE | 1 AS | 002083964 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | BRACKET, GROUND ELECTRODE | 1 AS | 002083963 |
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | MOUNTING, SUPP. ELECTRODE | 1 EA |
|
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | SUPPRESSION ELECTRODE, REV | 1 EA |
|
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | MOUNT PLATE, GROUND ELECTRODE | 1 EA |
|
| 9500 - XR DUAL BELLOWS EXTRACTION ASSY | ELECTRODE, GROUND | 1 EA |
|
| 9500 - xR SOURCE CHAMBER ASSY | COVER, PLATE SOURCE | 1 EA | 002082803 |
| 9500 - xR SOURCE CHAMBER ASSY | SHIELD, GRAPHITE(55 X 94) | 1 EA | 002082474 |
| 9500 - xR SOURCE CHAMBER ASSY | LINER,CLAMP PLATE | 1 EA | 002083172 |
| 9500 - xR SOURCE CHAMBER ASSY | SST FHSVM .315LG MOS2 COATED | 2 EA | 369091125 |
| 9500 - xR SOURCE CHAMBER ASSY | SHIELD, GPH (55X94) INSERT | 1 EA |
|
| 9500 - xR SOURCE CHAMBER ASSY | SHIELD, GRAPHITE, FRAME | 1 EA |
|
| 9500 - xR SOURCE CHAMBER ASSY | PLATE, COVER, BERNAS A/C | 1 EA | 002084114 |
| 9500 ANALYZER | INSERT, INNER | 1 EA | 002098878 |
| 9500 ANALYZER | INSERT, OUTER | 1 EA | 002098877 |
| 9500 ANALYZER | INSERT, NEUTRAL | 1 EA | 002098879 |
| 9500 XR ANALYZER | INSERT, OUTER | 1 EA | 002099455 |
| 9500 XR ANALYZER | INSERT, NEUTRAL, FLIGHT TUBE | 1 EA | 002099454 |
| 9500 XR ANALYZER | INSERT, INNER | 1 EA | 002099470 |
| 9500 XR ANALYZER | COVER, FLIGHT TUBE COLUMN | 2 EA | 002099490 |
| 9500 - XR PRE-DEFINING COMPONENTS | HOLDER, PRE-DEF. APT | 1 EA | 002082550 |
| 9500 - XR PRE-DEFINING COMPONENTS | APERTURE, PRE-DEFINING, 25 X 68 | 1 EA | 002081475 |
| 9500 - XR PRE-DEFINING COMPONENTS | APERTURE, PRE-DEFINING, 40 X 64 | 1 EA | 002083923 |
| 9500 - XR MRS ASSY | PRE MRS SLIT | 1 EA | 002084988 |
| 9500 - XR MRS ASSY | PRE MRS SLIT | 1 EA | 002098649 |
| 9500 - XR MRS ASSY | LOW DOSE SLIT | 1 EA | 002080236 |
| 9500 - XR MRS ASSY | VANE, MRS | 2 EA | 002082810 |
| 9500 - XR MRS ASSY | POST MRS SLIT | 1 STK | 002097885 |
| 9500 - XR MRS ASSY | POST MRS SLIT | 1 EA | 002083925 |
| MRS VANE OPTIONS | VANE, MRS | 1 EA | 002082810 |
| MRS VANE OPTIONS | VANE, MRS, QX+ | 1 EA | 002064976 |
| MRS VANE OPTIONS | VANE, MRS, REINFORCED | 1 EA | 002099710 |
| MRS VANE OPTIONS | VANE, MRS, REINFORCED | 1 EA |
|
| MRS VANE OPTIONS | VANE, MRS, REINFORCED, QX+ | 1 EA |
|
| MRS VANE OPTIONS | VANE, MRS, MODIFIED | 1 STK |
|
| MRS VANE OPTIONS | VANE, MRS, MODIFIED, QX+ | 1 STK |
|
| 9500 POST ACCEL | INSERT, EH-1 | 1 EA | 002082467 |
| 9500 POST ACCEL | HOLDER, EH-1 | 1 STK | 002082918 |
| 9500 POST ACCEL | APERTURE, EH0 | 1 EA | 002082675 |
| 9500 POST ACCEL | ELECTRODE, EH1 | 1 EA | 002098947 |
| XR POST ACCEL | ELECTRODE EH-1 | 1 EA | 002083962 |
| XR POST ACCEL | ELECTRODE, EH0 | 1 EA | 002083926 |
| XR POST ACCEL | ELECTRODE, EH1 | 1 EA | 002083927 |
| 9500 - XR MOVEABLE PA | ELECTRODE,EH3 | 1 EA | 002098949 |
| 9500 - XR MOVEABLE PA | MOUNTING, EH3 ELECTRODE | 1 EA | 002083667 |
| 9500 - XR MOVEABLE PA | ELECTRODE, EH4 | 1 EA | 002083666 |
| 9500 - XR MOVEABLE PA | APERTURE,(EPG1) | 1 EA | 002080686 |
| 9500 - XR MOVEABLE PA | SCREEN ENTRY, TUBE SIDE | 2 EA | 002080688 |
| 9500 - XR MOVEABLE PA | SCREEN ENTRY | 2 EA | 002080687 |
| 9500 - XR MOVEABLE PA | ELECTRODE, EH3 | 1 EA | 002083928 |
| 9500 - XR MOVEABLE PA | MOUNTING, EH3 | 1 EA | 002084191 |
| 9500 - XR MOVEABLE PA | ELECTRODE, EH4 | 1 EA | 002083929 |
| 9500 - XR MOVEABLE PA | APERTURE EPG1 | 1 EA | 002083930 |
| 9500 - XR MOVEABLE PA | APERTURE (EPG2) | 1 STK | 002083931 |
| 9500 - XR MOVEABLE PA | APERTURE FRONT | 1 STK | 002083950 |
| 9500 - XR MOVEABLE PA | SCREEN, SIDE, ENTRY TUBE | 2 STK | 002082830 |
| 9500 - XR MOVEABLE PA | SCREEN, ENTRY TUBE | 2 STK | 002082829 |
| 9500 - XR PFS | GUIDE TUBE SIDE | 2 STK | 002082826 |
| 9500 - XR PFS | GUIDE TUBE TOP | 1 STK | 002082827 |
| 9500 - XR PFS | FILAMENT, ARC, CHAM, DIA 2.4 | 1000 ST | 002082135 |
| 9500 - XR PFS | REFLECTOR REMOTE INSULATOR | 2 STK | 002082053 |
| 9500 - XR PFS | TOP SHIELD (GAS SEAL PFS) | 1 EA | 002085053 |
| 9500 - XR PFS | GAS SEAL, BOR NIT (PFS) | 1 EA | 002083418 |
| 9500 - XR PFS | PFS FILAMENT CLAMP L/H | 1 EA | 002082131 |
| 9500 - XR PFS | MO - CLAMP FILAMENT L/H | 1000 ST | 002084966 |
| 9500 - XR PFS | CLAMP, FILAMENT, R/H, 2.4 | 1000 ST | 004095948 |
| 9500 - XR PFS | PFS FILAMENT CLAMP R/H | 1 EA | 004094526 |
| 9500 - XR PFS | INSULATOR PLASMA HEAD | 4 STK | 002082035 |
| 9500 - XR PFS | ARC CHAM. REMO INS PFS | 1 EA | 002082054 |
| 9500 - XR PFS | SHIELD GUIDE TUBE(TOP) | 1 STK | 002080634 |
| 9500 - XR PFS | SHIELD, GUIDE TUBE (PRE) | 2 EA | 002080632 |
| 9500 - XR PFS | GUIDE TUBE SIDE | 2 STK | 002082825 |
| 9500 - XR PFS | GUIDE TUBE BOTTOM | 1 STK | 002082828 |
| 9500 - XR PFS | SHIELD, GUIDE TUBE (BOT) | 1 EA | 002080635 |
| 9500 - XR PFS | SHIELD, GUIDE TUBE (POST) | 2 EA | 002080633 |
| 9500 HDPFS GUIDE TUBE | GUIDE TUBE BOTTOM | 1 EA | 002190709 |
| 9500 HDPFS GUIDE TUBE | FILAMENT SHIELD | 1 EA | 002190298 |
| 9500 HDPFS GUIDE TUBE | FRONT APERTURE | 1 EA | 002190371 |
| 9500 HDPFS GUIDE TUBE | MAGNET, GUIDE TUBE | 7 EA | 103090024 |
| 9500 HDPFS GUIDE TUBE | MAGNET RETAINER, G. TUBE | 7 EA | 002190440 |
| 9500 HDPFS GUIDE TUBE | GUIDE TUBE SIDE,LEFT | 1 EA | 002190707 |
| 9500 HDPFS GUIDE TUBE | GUIDE TUBE TOP | 1 EA | 002190708 |
| 9500 HDPFS GUIDE TUBE | INSULATOR, TYPE SM7 | 4 EA | 002190020 |
| 9500 HDPFS GUIDE TUBE | MIDDLE APERTURE | 1 EA | 002190372 |
| 9500 HDPFS GUIDE TUBE | GUIDE TUBE SIDE,RIGHT | 1 EA | 002190366 |
| 9500 HDPFS GUIDE TUBE | SST FHSVM .315LG MOS2 COATED | 2 EA | 369091125 |
| 9500 HDPFS GUIDE TUBE | APERTURE PLATE, 50% RED | 1 EA | 002190441 |
| 9500 HDPFS GUIDE TUBE | BOLT, SST SHOULDER .394LG | 4 EA | 369091182 |
| 9500 HDPFS GUIDE TUBE | FILAMENT CLAMP ASSY | 2 AS | 002190016 |
| 9500 HDPFS GUIDE TUBE | INSULATOR, FILAMENT CLAMP | 1 EA | 002190019 |
| 9500 HDPFS GUIDE TUBE | FILAMENT INSULATOR | 2 EA | 002190311 |
| 9500 HDPFS GUIDE TUBE | MAGNET, SOURCE | 1 EA | 103090022 |
| 9500 HDPFS GUIDE TUBE | HEAT SHIELD | 1 EA | 002089169 |
| 9500 HDPFS GUIDE TUBE | SUPPORT, GUIDE TUBE | 4 EA | 002089171 |
| 9500 HDPFS GUIDE TUBE | ARC CHAMBER | 1 EA | 002190307 |
| 9500 HDPFS GUIDE TUBE | FILAMENT | 1 EA | 002190017 |
| 9500 HDPFS GUIDE TUBE | SCREW, SST BHCV .236LG | 1 EA | 369091181 |
| 9500 HDPFS GUIDE TUBE | WASHER, LOCK SST | 1 EA | 388090186 |
| 9500 HDPFS GUIDE TUBE | WASHER, FLAT, SST, #4 | 1 EA | 388090187 |
| 9500 HDPFS GUIDE TUBE | SCREW, SST FH .394LG | 2 EA | 369091175 |
| 9500 HDPFS GUIDE TUBE | GUIDE TUBE PLATE | 1 EA | 002190365 |
| 9500 HDPFS GUIDE TUBE | SCREW, M4X.7, SHCSOV, .315IN LG, SST | 12 EA | 369091176 |
| 9500 HDPFS GUIDE TUBE | APERTURE PLATE, 67% RED. | 1 EA | 002190442 |
| 9500 HDPFS GUIDE TUBE | FILAMENT CLAMP ASSY | 1 AS | 002190016 |
| 9500 HDPFS MOUNTING | MOUNT BRACKET, RIGHT | 1 EA | 004097998 |
| 9500 HDPFS MOUNTING | MOUNT BRACKET, LEFT | 1 EA | 002190361 |
| 9500 HDPFS MOUNTING | MOUNT PLATE,TOP | 1 EA | 002190362 |
| 9500 HDPFS MOUNTING | INSULATOR, TYPE SM7 | 6 EA | 002190020 |
| 9500 HDPFS MOUNTING | SST WASHER, FLAT, M5 | 15 EA | 388090184 |
| 9500 HDPFS MOUNTING | SST BHCS .787LG | 14 EA | 369091118 |
| 9500 HDPFS MOUNTING | MOUNT PLATE, INSULATOR | 1 EA | 002190364 |
| 9500 HDPFS MOUNTING | INSULATING FLANGE | 1 EA | 002190214 |
| 9500 HDPFS MOUNTING | SST BHCS 1.181 IN.LG | 3 EA | 369091122 |
| 9500 HDPFS MOUNTING | INSULATING FLANGE | 1 EA | 002190215 |
| 9500 HDPFS MOUNTING | WASHER, SST SINGLE COIL | 2 EA | 338090042 |
| 9500 HDPFS MOUNTING | SST WASHER, FLAT, M6 | 2 EA | 338090045 |
| 9500 HDPFS MOUNTING | NUT, SST HEX | 2 EA | 350090132 |
| 9500 HDPFS MOUNTING | INSULATOR | 2 EA | 342090096 |
| 9500 HDPFS MOUNTING | CONN STRAP SET | 1 EA | 004090113 |
| 9500 HDPFS MOUNTING | SOURCE CHAMBER ASSY | 1 AS | 004097999 |
| 9500 HDPFS MOUNTING | FEED ROD SET | 1 JEU | 002190018 |
| 9500 HDPFS MOUNTING | SCREW, M4X.7, SHCSOV, .315IN LG, SST | 12 EA | 369091176 |
| 9500 HDPFS MOUNTING | SST WASHER, FLAT, M4 | 8 EA | 388090183 |
| 9500 HDPFS MOUNTING | SPUTTER SHIELD | 1 EA | 002190373 |
| 9500 HDPFS MOUNTING | GAS LINE ASSEMBLY | 1 AS | 004090141 |
| 9500 HDPFS MOUNTING | GASKET, 1/4-1/2 VCR PTFE | 1 EA | 002089168 |
| 9500 HDPFS MOUNTING | SCREW, SST FH .394LG | 4 EA | 369091175 |
| 9500 HDPFS MOUNTING | O RING .239 ID | 1 EA | 370090467 |
| 9500 HDPFS MOUNTING | WASHER, LOCK SST | 12 EA | 388090182 |
| 9500 HDPFS MOUNTING | BOLT, SST SHOULDER .157LG | 3 EA | 369091179 |
| 9500 HDPFS MOUNTING | SUPPORT PLATE | 1 EA | 002190305 |
| 9500 HDPFS MOUNTING | SST SHCS | 4 EA | 369091119 |
| 9500 HDPFS MOUNTING | INSULATOR, SUPPORT PLATE | 1 EA | 002190216 |
| 9500 HDPFS MOUNTING | MOUNT PLATE, SOURCE CHAMBER | 1 EA | 002190363 |
| 9500 HDPFS MOUNTING | SST LOCK WASHER (MLW-05) | 9 EA | 338090044 |
| 9500 HDPFS MOUNTING | CONNECTOR STRAP SET | 1 JEU | 004001477 |
| 9500 HDPFS MOUNTING | SOURCE CHAMBER ASSY. | 1 AS | 004002612 |
| XR HDPFS GUIDE TUBE | GUIDE TUBE TOP | 1 EA | 002190438 |
| XR HDPFS GUIDE TUBE | GUIDE TUBE SIDE LEFT | 1 EA | 002190437 |
| XR HDPFS GUIDE TUBE | MAGNET, GUIDE TUBE | 7 EA | 103090024 |
| XR HDPFS GUIDE TUBE | MAGNET RETAINER, G. TUBE | 7 EA | 002190440 |
| XR HDPFS GUIDE TUBE | GUIDE TUBE BOTTOM | 1 EA | 002190439 |
| XR HDPFS GUIDE TUBE | SCREW, M4X.7, SHCSOV, .315IN LG, SST | 22 EA | 369091176 |
| XR HDPFS GUIDE TUBE | SST FHSVM .315LG MOS2 COATED | 2 EA | 369091125 |
| XR HDPFS GUIDE TUBE | WASHER, FLAT, SST, #4 | 1 EA | 388090187 |
| XR HDPFS GUIDE TUBE | WASHER, LOCK SST | 1 EA | 388090186 |
| XR HDPFS GUIDE TUBE | SCREW, SST BHCV .236LG | 1 EA | 369091181 |
| XR HDPFS GUIDE TUBE | SCREW, SST FH .394LG | 6 EA | 369091175 |
| XR HDPFS GUIDE TUBE | APERTURE PLATE, 50% RED | 1 EA | 002190441 |
| XR HDPFS GUIDE TUBE | FILAMENT | 1 EA | 002190017 |
| XR HDPFS GUIDE TUBE | ARC CHAMBER | 1 EA | 002190307 |
| XR HDPFS GUIDE TUBE | HEAT SHIELD | 1 EA | 002089169 |
| XR HDPFS GUIDE TUBE | MAGNET, SOURCE | 1 EA | 103090022 |
| XR HDPFS GUIDE TUBE | BOLT, SST SHOULDER .157LG | 3 EA | 369091179 |
| XR HDPFS GUIDE TUBE | SUPPORT, GUIDE TUBE | 4 EA | 002089171 |
| XR HDPFS GUIDE TUBE | INSULATOR, FILAMENT CLAMP | 1 EA | 002190019 |
| XR HDPFS GUIDE TUBE | FILAMENT INSULATOR | 2 EA | 002190311 |
| XR HDPFS GUIDE TUBE | FILAMENT CLAMP ASSY | 2 AS | 002190016 |
| XR HDPFS GUIDE TUBE | WASHER, LOCK SST | 10 EA | 388090182 |
| XR HDPFS GUIDE TUBE | SST SHCS | 4 EA | 369091119 |
| XR HDPFS GUIDE TUBE | BOLT, SST SHOULDER .394LG | 4 EA | 369091182 |
| XR HDPFS GUIDE TUBE | GUIDE TUBE PLATE | 1 EA | 002190297 |
| XR HDPFS GUIDE TUBE | GUIDE TUBE SIDE, RIGHT | 1 EA | 002190299 |
| XR HDPFS GUIDE TUBE | FILAMENT SHIELD | 1 EA | 002190298 |
| XR HDPFS GUIDE TUBE | GUIDE TUBE APERTURE | 1 EA | 002190304 |
| XR HDPFS MOUNTING | SST WASHER, FLAT, M4 | 8 EA | 388090183 |
| XR HDPFS MOUNTING | SST WASHER, FLAT, M6 | 2 EA | 338090045 |
| XR HDPFS MOUNTING | WASHER, SST SINGLE COIL | 2 EA | 338090042 |
| XR HDPFS MOUNTING | NUT, SST HEX | 2 EA | 350090132 |
| XR HDPFS MOUNTING | INSULATOR | 2 EA | 342090096 |
| XR HDPFS MOUNTING | CONN STRAP SET | 1 JEU | 004097904 |
| XR HDPFS MOUNTING | SST BHCS .787LG | 1 EA | 369091118 |
| XR HDPFS MOUNTING | INSULATING FLANGE | 1 EA | 002190214 |
| XR HDPFS MOUNTING | FEED ROD SET | 1 JEU | 002190018 |
| XR HDPFS MOUNTING | SST BHCS 1.181 IN.LG | 7 EA | 369091122 |
| XR HDPFS MOUNTING | SST WASHER, FLAT, M5 | 6 EA | 388090184 |
| XR HDPFS MOUNTING | INSULATOR, TYPE SM7 | 8 EA | 002190020 |
| XR HDPFS MOUNTING | MOUNT BRACKET, PFS | 1 EA | 002190212 |
| XR HDPFS MOUNTING | SPUTTER SHIELD | 1 EA | 002190316 |
| XR HDPFS MOUNTING | MOUNT PILLAR | 3 EA | 002190211 |
| XR HDPFS MOUNTING | O RING .239 ID | 1 EA | 370090467 |
| XR HDPFS MOUNTING | SUPPORT PLATE | 1 EA | 002190305 |
| XR HDPFS MOUNTING | INSULATOR, SUPPORT PLATE | 1 EA | 002190216 |
| XR HDPFS MOUNTING | GASKET, 1/4-1/2 VCR PTFE | 1 EA | 002089168 |
| XR HDPFS MOUNTING | MOUNT BRACKET,SOURCE CHAM | 1 EA | 004097902 |
| XR HDPFS MOUNTING | GAS LINE ASSEMBLY | 1 AS | 004090141 |
| XR HDPFS MOUNTING | SST WASHER, FLAT, M8 | 2 EA | 338090046 |
| XR HDPFS MOUNTING | SCREW, SST SHCSC .984LG | 2 EA | 369091124 |
| XR HDPFS MOUNTING | SST LOCK WASHER (MLW-05) | 1 EA | 338090044 |
| XR HDPFS MOUNTING | SOURCE CHAMBER ASSY | 1 AS | 004097903 |
| XR HDPFS MOUNTING | INSULATING FLANGE | 1 EA | 002190215 |
| ARC CHAMBER OPTIONS | APERTURE PLATE, 50% RED | 1 EA | 002190441 |
| ARC CHAMBER OPTIONS | APERTURE PLATE, 67% RED. | 1 EA | 002190442 |
| ARC CHAMBER OPTIONS | APERTURE PLATE, 67% REDUCED | 1 EA | 002053785 |
| ARC CHAMBER OPTIONS | FILAMENT | 1 EA | 002190017 |
| ARC CHAMBER OPTIONS | FILAMENT, HDPFS | 1 STK |
|
| ARC CHAMBER OPTIONS | ARC CHAMBER | 1 EA | 002190307 |
| ARC CHAMBER OPTIONS | ARC CHAMBER | 1 EA | 002190307 |
| ARC CHAMBER OPTIONS | APERTURE PLATE, 50% RED, | 1 EA |
|
| ARC CHAMBER OPTIONS | APERTURE PLATE, 67% RED., TEXT | 1 EA |
|
| ARC CHAMBER OPTIONS | APERTURE PLATE, TEXTURED BOTH | 1 EA |
|
| ARC CHAMBER OPTIONS | ARC CHAMBER, TEXTURED | 1 EA |
|
| ARC CHAMBER OPTIONS | ARC CHAMBER, TEXTURED | 1 STK |
|
| 9500 - XR BEAM STOP | APERTURE PLATE | 1 EA | 002083953 |
| 9500 - XR BEAM STOP | SHIELDING,END | 2 EA | 002082834 |
| 9500 - XR BEAM STOP | SHIELDING,SIDE | 2 EA | 002082833 |
| 9500 - XR BEAM STOP | BEAM STOP | 1 EA | 002082832 |
| 9500 - XR BEAM STOP | 3 POSITION BEAM STOP 1 | 1 STK | 002083787 |
| 9500 - XR BEAM STOP | 3 POSITION BEAM STOP 2 | 1 STK | 002083786 |
| 9500 - XR BEAM STOP | 3 POSITION BEAM STOP 3 | 1 STK | 002083785 |
