8 Inch Wafer

产品介绍

200MM
SPEC	0.2um≤30ea	–
Diameter(mm)	200±0.2	200±0.2
Type	P	P
Crystal Orientation	<110>±1	<110>±1
Notch Orientation	<110>±1	<110>±1
Resistivity(Ω•cm)	1-100	1-100
Thickness(μm)	725±25	725±25
TTV(μm)	≦25	≦2
BOW(μm)	≤ 40	≤ 40
WARP(μm)	≤ 40	≤ 40
LM	No	No
Surface Metal	≤5.0E 10 atom/cm2	≤5.0E 10 atom/cm2