RF MATCH (AE Navigator)

产品介绍

RF MATCH features high-speed, efficient, and highly stable matching performance, making it suitable for high-speed matching applications with stringent requirements.

Used in conjunction with RF power supplies, it is applicable to plasma etching, PECVD, RF sputtering, parallel plates, RF laser, ICP, RIE, CVD, PVD and other semiconductor and solar thin film processes.




Product Features

• Millisecond-level response time and stable and continuous process control

• Compatible with automatic and manual matching, offering higher reliability

• Advanced RF power measurement system

• L-type topology structure with a wider power range

• Supports pulse working mode

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Replaceable Products

• AE Navigator

• AE Navigator II

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Technical Parameters

Category	Parameter	Specification
Electrical Specifications	Operating Frequency	13.56MHz±5%
	AC Mains Input Voltage	AC 100V ~ 240V
	AC Mains Input Frequency	50Hz ~ 60Hz
	AC Mains Input Current	0.7A ~ 1.0A
	Maximum Transmission Power	1500W
	Maximum RF Load Voltage	5000Vpk
	Maximum RF Load Current	40A RMS
	Matching Time	<1s at the preset position
	Post-matching Reflection Power	Less than 1% of the set power value
Heat Dissipation & Environment Specifications	Cooling Method	Air cooling
	Operating Temperature & Humidity	+5℃ ~ +40℃, 5% ~ 70%
Size Specifications	Volume	358 (D) × 368 (W) × 130 (H) mm
	Topology Structure	L-type
	RF Input Interface	N female
	RF Output Interface	7/16 female