当前位置:首页>产品中心>Ion implanter parts>VARIAN Spare parts for E500
收藏

VARIAN Spare parts for E500

数量
- +

产品介绍

    (2) / E17017510 / Locks, connector, source, filament
    (2) / E17036920 / Plates, side, arc chamber
    (1) / E17036971 / Strap, reflector, dual vaporizer
    (1) / E17121420 / Strap, reflector, bernas source
    (1) / E17121430 / Spring, filament, right Hand
    (1) / E17121431 / Spring, filament, left Hand
    (1) / E35000167 / Boot, rubber
    (2) / E35000197 / Seals, fluoroloy, spring Loaded, +650 to -4
    (2) / E35000349 / Seal assemblies, fluoraloy
    (22) / E35000404 / Seal, fluorocarbon, AR10401-210 UC
    (1) / E35000405 / Seals, fluoro, radial, 0.124 ID, coated
    (1) / E35000417 / Seals, fluoro, 0.987 ID x 1.243 OD, .151 L
    (3) / 3320607 / Screw, vented, socket Head, 6-32 x 7/16 L
    (1) / E17034940 / Shim, pinion, collar
    (1) / E35000430 / O-Ring, buna, 0.094 ID x 0.016 W
    (1) / E40000144 / Spring, associated, C0180-0
    (1) / E40000317 / Spring, compression, 0.42 OD x 0.62 L
    (1) / E42000044 / Bushing, bronze, oil Imp, 5/16" Shaft, 3/8 OD
    (2) / E42000093 / Bearings, 1/8 x 1/8 LG
    (5) / E43000005 / Rings, retaining, E-type, 0.125 Shaft
    (2) / E43000020 / Rings, retaining, internal, 1.18 Housing
    (2) / E43000024 / Rings, retaining, 0.250 Shaft
    (6) / E43000047 / Rings, retaining, spiral, .812 bore, 1.000 housing
    (2) / E43000050 / Rings, retaining, Beryllium Copper, 0.188 S
    (2) / E43000078 / Rings, retaining, internal, 1.250 housing
    (2) / E43000085 / Rings, retaining, internal, 1.00 housing
    (2) / E43000090 / Rings, retaining, beveled, 1.000 shaft
    (2) / E43000097 / Rings, retaining, 0.500 shaft
    (4) / E43000104 / Springs, pin
    (4) / E43000137 / Pins, dowel, 1/16 x 3/16
    (1) / E43000155 / Ring, retaining, spiral, 1.50 ID ring, RE
    (1) / E43000156 / Ring, retaining, spiral, 1.062", housing bore
    (1) / E43000157 / Dowel pin
    (4) / E43000170 / Rings, retaining, Beryllium Copper, .125 S
    (2) / E43000259 / Rings, retaining, internal, 0.500 housing
    (5) / E47000313 / Screws, cap, socket head, hex, 6-32 x 7/8
    (3) / 2111052 / -
    (4) / 2866079 / Standoff, ceramic, 1-1/2 x 3/8
    (1) / E12000230 / Standoff, suppression, manipulator
    (1) / E12008300 / Gear, orient drive, modified maxon
    (2) / E17014840 / Feedthru, source, filament
    (5) / E17036930 / Clamps, filament, bernas
    (6) / E17143760 / Rods, retaining, arc chamber, source
    (1) / E40000075 / Spring, wave, carbon Steel, 3.25 , 4 waves
    (12) / E59000002 / Standoff, ceramic, 1/2" L, 3/8" OD, 6-32 THD
    (9) / E59000010 / Standoff, ceramic, insulators, 3/4" OD x 2" L
    (6) / E59000011 / Standoff, ceramic, smith, 2 L x 3/8 OD
    (3) / E17183480 / Shield, insulating, suppression Fee
    (3) / E59000021 / Standoff, Ceramic, 1-1/4" L x 3/8" OD
    (6) / Y0200023761 / Screws, CSK HD M3*8 Aluminium
    (6) / 2541122 / O-Rings, Viton, 1 1/8 ID
    (6) / 2542041 / O-Rings, Viton, 3 ID
    (1) / 2541157 / O-Ring, Buna-N 4 1/2 x 0.103 W
    (3) / 2541204 / O-Rings, buna N, 3/8 ID
    (7) / 2542224 / O-Rings, Viton, 1.734
    (1) / 2542264 / O-Ring, Viton, 7.484" ID x 0.139
    (2) / 2542370 / O-Rings, viton, 8-1/4 ID
    (3) / 2542381 / O-Rings, viton, 11.975 ID
    (2) / 2543016 / O-Rings, Silicon, 0.614" ID x 1/16" W
    (2) / 2543119 / O-Rings, Viton, 11.475 ID x 0.210 W, 60 Duro
    (2) / 2740960 / O-Rings, Viton, 7/8 ID
    (2) / 2541202L / O-Rings, buna N, 1/4 ID
    (4) / E35000007 / O-Rings, Viton, 5/16 ID x 3/32 W
    (2) / E35000010 / O-Rings, Viton, 2-3/4 ID
    (2) / E35000011 / O-Rings, buna, 3-1/4 ID
    (1) / E35000020 / O-Ring, Viton, 3 Id x 1/8 W, deflashed
    (5) / E35000027 / O-Ring, VARIAN 953-5073 1-3
    (1) / E35000033 / O-Ring, buna, 5-1/4 ID
    (1) / E35000042 / O-Ring, buna, 2-278 ID
    (1) / E35000045 / O-Ring, Viton, 2-1/2 ID
    (1) / E35000047 / O-Ring, buna, 7 ID x 1/8 W
    (1) / E35000049 / O-Ring, Viton, 1-3/4 ID
    (3) / E35000064 / O-Rings, buna, 2-1/2 ID
    (11) / E35000067 / O-Rings, buna, 3/8 ID
    (2) / E35000078 / O-Rings, buna, 1-5/8 ID
    (1) / E35000080 / O-Ring, replaced by E35000562
    (1) / E35000086 / O-Ring, buna, 4-5/8 Id
    (1) / E35000088 / O-Ring, buna, 3-3/8" ID
    (1) / E35000091 / O-Ring, buna, 1-11/16
    (10) / E35000096 / O-Rings, buna, 1/4 ID x 1/16 W, deflashed
    (4) / E35000104 / O-Rings, buna, .4 ID
    (5) / E35000108 / O-Rings, buna, 3/16 ID
    (10) / E35000134 / O-Rings, buna, 14 ID
    (1) / E35000135 / O-Ring, buna, 17 ID
    (4) / E35000136 / O-Rings, buna, 3/4 ID
    (3) / E35000139 / O-Rings, buna, 5/8 ID
    (2) / E35000146. / O-Rings, Viton, 3-3/4 ID
    (1) / E35000149 / O-Ring, Viton, 8-3/4 ID
    (3) / E35000154 / O-Rings, buna, 1/2 ID
    (1) / E35000165 / O-Ring, buna, 3/16 ID x 3/32 W
    (2) / E35000166 / O-Rings, Viton, 15 ID
    (10) / E35000183 / O-Rings, buna, 18.5 ID x 0.139 OD
    (8) / E35000184 / O-Rings, buna, 17.62 ID x 0.139 OD
    (1) / E35000186 / O-Ring, buna, 21 ID
    (2) / E35000187 / O-Rings, buna, 2-1/2 ID x 1/16 W
    (4) / E35000188 / O-Rings, Viton, 2-113 (0.549 ID x 0.103 W)
    (9) / E35000189 / O-Rings, Viton, 0.487
    (2) / E35000190 / O-Rings, Viton, 0.859" ID x 0.139" W (Nominal)
    (1) / E35000191 / O-Ring, Viton, 7-1/4 ID
    (7) / E35000192 / O-Rings, Viton, 0.237 x O.103
    (2) / E35000206 / O-Rings, Viton, 0.364 ID x 0.070 W
    (1) / E35000208 / O-Ring, buna, 1.489 ID
    (1) / E35000210 / O-Ring, buna, 15/16 ID
    (3) / E35000220 / O-Rings, buna, 0.859
    (5) / E35000222 / O-Rings, Viton, 4.109 x 0.139
    (6) / E35000225 / O-Rings, Viton, 1-1/16 ID x 3/32 W
    (1) / E35000231 / O-Ring, Viton, 3.25 ID
    (2) / E35000233 / O-Rings, Viton, 1.984"
    (2) / E35000234 / O-Rings, Viton, 9.984
    (2) / E35000236 / O-Rings, Viton, 8-1/2 ID
    (1) / E35000237 / O-Ring, Viton, 9-1/4 ID
    (1) / E35000238 / O-Ring, Viton, 2-005
    (6) / E35000241 / O-Rings, Viton, 1/4 ID x 3/8 x 1/16
    (2) / E35000245 / O-Rings, Viton, 0.676
    (1) / E35000249 / O-Ring, Viton, 2 ID x 1/6 W
    (1) / E35000250 / O-Ring, Viton, 2-1/8 ID
    (5) / E35000254 / O-Rings, Viton, 3/8 ID x 3/32 W
    (6) / E35000259 / O-Rings, Viton, ID 1.674 x 0.103 W
    (4) / E35000265 / O-Rings, Viton, 3/4 ID
    (1) / E35000279 / O-Ring, Viton, 4-5/8 ID
    (2) / E35000280 / O-Rings, Viton, 4.734
    (1) / E35000283 / O-Ring, Viton, 5.234
    (7) / E35000286 / O-Rings, Viton
    (2) / E35000287 / O-Rings, Viton, 6.734
    (2) / E35000288 / O-Rings, Viton, 6.984
    (1) / E35000310 / O-Ring, Viton, 9.475
    (1) / E35000322 / O-Ring, Viton, 2.609
    (1) / E35000323 / O-Ring, Viton, 3.734
    (1) / E35000327 / O-Ring, Viton 2-374
    (2) / E35000329 / O-Rings, Viton, 2.362
    (5) / E35000335 / O-Rings, Viton, 3-1/4 ID x 3 -1/2 OD
    (1) / E35000338 / O-Ring, Viton, 5 ID
    (2) / E35000340 / O-Rings, buna, 2 ID x 2-3/8 W
    (1) / E35000341 / O-Ring, Viton, 1.362 x 0.103" W
    (1) / E35000348 / O-Ring, Viton, 1-1/4 ID
    (1) / E35000402 / O-Ring, Viton, 7-1/4 ID
    (5) / E35000419 / O-Rings, flouro (Viton), 13/16" ID x 1 3/16 OD
    (1) / E35000423 / O-Ring, Viton, 1.487 ID
    (2) / E35000444 / O-Rings, Viton, 1-1/16 ID
    (2) / E35000495 / O-Rings, Viton, 15.955 ID x .210 W 70 Duro
    (4) / E35000511 / Washers, ultraseal, Viton
    (1) / E41000075 / Belt, timing, 18.750 pitch, 50 teeth, 1/2 W
    (4) / 280052 / -
    (4) / 2549315 / Fitting elbows
    (1) / 2555069 / Spring, compression
    (5) / 2841015 / Pins, roll, 1/8 dia x 3/4 L x 0.028 W
    (1) / E17143890 / Cap, graphite
    (2) / E40000106 / Screws, shoulder, 0.156 x 5/16 L x 6-32 th
    (1) / E40000134 / Spring, associated, SS
    (2) / E42000078 / Bearings, 1/4 D X 1/4 L, DU14-8
    (2) / E42000081 / -
    (1) / E42000088 / -
    (1) / E42000175 / Bearing, ball, 0.875 ID X 1.125 OD, 0.1562 W
    (1) / E42000241 / Bearing, ball, radial, 1.250 bore
    (1) / E42000242 / Bearing, ball, radial, .4724 bore
    (1) / E42000243 / Bearing, ball, radial, 1.0625 with superlube
    (2) / E43000021 / Rings, retaining, beveled, .312 shaft
    (4) / E43000133 / Springs, pin
    (2) / E43000210 / Dowel pins
    (2) / E43000212 / Dowel pins, 3/32 x 5/16
    (10) / E45000067 / Screws, set, Nylon, 10-32
    (3) / E46000063 / Washers, flat, Nylon, 0.75 OD x 0.510 ID
    (5) / E59000026 / -
    (1) / 2100024 / Connector, MHV, receptacle, bulkhead
    (6) / E17014880 / Insulators, screw, source, feedthru
    (6) / E17021640 / Seals, ring, head
    (6) / E17036030 / Insulator, mirror, 60 kV and 30 kV
    (2) / E17165670 / -
    (2) / E42000112 / Bearings, ball, .0937 ID x 0.3125 OD x 0.1406 W
    (1) / E42000115 / Bearing, ball, B1-24
    (3) / E42000130 / -
    (1) / E51000055 / Receptacle, copper, silver Plated, high cur
    (4) / E12003620 / Connectors, ground, lamp, dual vaporizer
    (30) / E17063840 / Insulators, lamp, dual vaporizer
    (1) / E17027430 / -
    (11) / E17063980 / Screws, lamp, insulator, dual vaporizer
    (4) / E17119720 / Standoff, short
    (4) / E17119750 / Standoff, long
    (4) / E42000111 / Bearings, ball, linear, LMB-1 SS
    (1) / E42000164 / Bearing, needle, roller, drawn cup, 1.5000
    (1) / E43000121 / Key, woodruff, CR-207
    (2) / E17014682 / -
    (1) / E17020280 / Shield, insulator, accelerator
    (1) / E17021840 / Seal, head, spacer
    (1) / E17027310 / Seal, retainer, roplat
    (4) / E17037010 / Insulators, clamp, filament, bernas source
    (3) / E42000074 / Bearings, ball, 0.6693 bore
    (1) / E42000249 / Washer, thrust, 1.250
    (2) / E42000036 / Bushings, ball, THOMPSON Super 12
    (2) / E42000082 / -
    (2) / E42000106 / Bearings, KAYDON KAA-10 AG
    (1) / E42000109 / Bearing, ball, 1.5 OD
    (1) / E42000163 / Bearing, caged, needle, roller, 0.500 ID
    (1) / E42000246 / Bearing, thrust, needle, 1.250
    (2) / E42000284 / -
    (1) / 6095005 / Wire, tantalum, 0.030 dia
    (1) / E12005121 / Light sensor roplate
    (1) / E17001611 / Shielding cup, supression feedthr
    (10) / E17014680 / Insulators, multi feedthru
    (1) / E17014800 / Washer, spring, filament, source
    (4) / E17022890 / Tubes, lamp mounting, senslight
    (5) / E17022900 / Lamps, clamp
    (1) / E17036910 / Spring, filament, right hand
    (1) / E17036911 / Spring, filament, left hand
    (1) / E17063870 / Conductor, thermal, crucible, dual vapourizer
    (1) / E17121430 / Spring, filament, right hand
    (2) / E17121431 / Springs, filament, left hand
    (1) / E17143770 / Rod, retaining
    (1) / E17154700 / -
    (1) / E17154710 / -
    (4) / E40000135 / -
    (1) / E40000182 / Spacer, shaft
    (2) / E40000187 / -
    (1) / E40000315 / Ring, retaining, internal, 0.687 housing
    (2) / E43000158 / Rings, retaining, spiral, 0.625 shaft
    (2) / E43000237 / Rings, retaining, E-type, 0.375 shaft
    (3) / E46000064 / Washers, nylon, .429 OD x 0.275
    (4) / E50000130 / Lamps, 3.5 V, 0.45 A
    (2) / E51000087 / -
    (14) / E51000170 / Terminal crimps male 24-30 AWG
    (1) / V27000093 / O-Ring, TVL, Viton, red
    (1) / E12003580 / Probe assembly, thermocouple, left, dual vapourizer
    (1) / E12003581 / Probe assembly, thermocouple, right, dual vapourizer
    (1) / 6095005 / Wire, Tantalum, 0.030 dia
    (2) / E17025430 / Cup assemblies, gate, faraday
    (2) / E17047480 / Shim, head, 0.005
    (2) / E17047490 / Shims, head, 0.002
    (1) / E19000270 / Belt, wafer handler, 40"
    (1) / E19000271 / Belt, 30", wafer handler
    (2) / E40000906 / -
    (6) / E42000041 / Bearings, ball, slide car, 15 mm x 18.7 mm
    (1) / E47000160 / Screw, vented, flat head, PHILIPS, 4-40
    (1) / E77000033 / Wire, bare Copper, 18 Awg
    (1) / E77000082 / -
    (1) / E92000044 / Loctite, 242 thread lock
    (1) / E92000102 / Castrol, braycote, 600 EF
    (4) / E40000001 / Springs, compression
    (1) / E40000089 / Spring, compression, SS
    (1) / E40000090 / Screw, shoulder, 6-32 x 3/16
    (4) / E40000428 / -
    (5) / E34000645 / Fittings, straight, male, OneTouch
    (2) / E60000015 / Lamps, incandescent, 12 V, .17 A
    (4) / 242052 / -
    (5) / 2115224 / -
    (1) / E12005121 / Sensor, proximity
    (1) / E12005132 / Motor, ropins
    (4) / E17014832 / Tubes, gas, dual vaporizer
    (1) / E17029380 / Plate, latch HK MTG
    (1) / E32000351 / -
    (1) / E42000062 / Wheel, V-Trac
    (2) / E47000073 / Screws, cap, socket head, hex, 1/4-20 x 1-3
    (6) / E47000085 / Screws, cap, socket head, hex, 5/16-18
    (13) / E19009080 / Filaments, Bernas source, E220/E500
    (14) / E17179690 / Screws, filament, Bernas
    (30) / E17168272 / Insulators, filament, inner, 3-Phase
    (30) / E17168280 / Nuts, insulator, outer, 3-Phase
    (1) / E17014691 / Plate, arc chamber, top
    (2) / E17036921 / Plates, side, arc chamber
    (1) / E17036950 / Clamp, spring, filament, Bernas source
    (3) / E17037064 / Shields, end plate, top, arc chamber
    (3) / E17037065 / Shields, end plate, bottom, arc chamber
    (1) / E17063160 / Plate, end, top, arc chamber
    (1) / E17063170 / Plate, end, bottom, arc chamber
    (1) / E17063190 / Plate, bottom, chamber, dual vaporizer
    (4) / E17063211 / Crucibles, coated, dual vaporizer
    (2) / E17063220 / Feed tube assemblies, dual vaporizer
    (1) / E17063251 / Cap, crucible, coated, dual vaporizer
    (5) / 3320612 / Screws, vented
    (10) / 3320816 / Screws, vented, SHC, 8-32 x 1" L, SS
    (20) / 3350806 / Screws, vented, buttonhead, 8-32 x 3
    (2) / E12000230 / Standoff, suppression, manipulator
    (12) / E17002860 / Cups, inner, shielding, manipulator
    (12) / E59000003 / Standoff, ceramic, 3/8" L x 3/8" OD
    (12) / E17002870 / Cups, outer, shielding, manipulator
    (9) / E17014500 / Pads, spider
    (1) / E17015350 / Isovalve desmodromic plata
    (2) / E17026540 / Electrodes, suppression
    (18) / E17045252 / Pads, pick
    (24) / E17045253 / Pads, pick
    (3) / E17072851 / Springs, E-clamp, ground
    (1) / E17133160 / Bracket, cable
    (7) / E17179690 / Screws, filament, no head
    (4) / E47000166 / Screws, vented, flat head, 6-32 x 5/16
    (4) / E47000309 / Screws, vented, BH, hex, 6-32 x 3/16
    (21) / E46000013 / Washers, Nylon, 0.190 ID x 0.310
    (2) / V27001006 / Seals, Teflon TVL
    (12) / E40000188 / Washers, spring, wave, SS
    (4) / E45000030 / Screws, Nylon, BH, 4-40 x 5/16
    (1) / 2590279 / Fitting, 90°, 25 nm
    (1) / 2595038 / Flange, vacuum, Bellows NW40
    (2) / E11034700 / Feedthru assemblies, suppression, manipulator
    (1) / E11050501 / Cable assembly, ropins feedthru
    (1) / E12005420 / Housing, farady cup, coated
    (1) / E15000201 / PCB Assembly, motion controller, arm / Lift / Scan
    (1) / E15000207 / PCB Assembly, motion control
    (1) / E15000320 / PCB Assembly, elevator control
    (3) / E15000330 / PCB Assemblies, NC optical switch
    (1) / E15000340 / PCB Assembly, no optical switch
    (1) / E15000400 / Servo amplifier board
    (1) / E15000420 / PCB Assembly, extender, linear motor
    (2) / E15001650 / PCB Assemblies, digital output, 24
    (1) / E15001670 / PCB Assembly, gas flow control
    (2) / E15002390 / PCB Assemblies, control Board, multi VAC gauge
    (1) / E15002090 / PCB Controller, power Supply
    (1) / E15002391 / PCB Assembly, vacuum, gauge, control Board
    (1) / E15005180 / PCB Assembly, sqm, light, link, interface
    (1) / E16008000 / Light link assembly, terminal, computer
    (1) / E16008020 / Term-light link assembly
    (1) / E16008050 / Light link assembly, terminal, 17 U-16 D
    (1) / E16008130 / Terminal light link assembly
    (1) / E16008251 / Cable, terminal light link assembly
    (1) / E16089651 / Cable assembly, ribbon, sqm option
    (1) / E17061280 / Aperture, support, resolving, 60 kV
    (1) / E17123251 / Shield, roplat
    (1) / E18001300 / Gauge, Go-No-Go, platform alignment
    (1) / E18001310 / Pick, alignment
    (1) / E18001390 / -
    (1) / E18001400 / -
    (1) / E18001430 / Tool, pick alignment
    (1) / E30000038 / Filter, PCS, mixed bed oxygen removal, 1/2
    (1) / E30000039 / Filter, PCS, mixed bed, 1/2
    (1) / E30000060 / Strainer, in-line, 3/4" NPT, 19"².
    (1) / E32000194 / Valve, flow Control, SS, with KEL-F tip
    (1) / E33000033 / Transducer, pressure, 100 mm Hg
    (2) / E33000182 / Gauges, tube, cold cathode, with baffle
    (1) / E35000507 / Seal, fluorology, G, 1.375 OD
    (4) / E51000094 / Connectors, fiber, optic, duplex
    (20) / E51000095 / Connectors, fiber optic, gray
    (20) / E51000096 / Connectors, fiber optic, blue
    (1) / E78000138 / Tube, vent, corr, TFE, 42"
    (1) / E78000179 / Tube, spiral Exhaust, with KF40 and 1-1/4 NPT
    (1) / E17008110 / Tube, spiral exhaust, with KF40 and 1-1/4 NPT
    (1) / E17020820 / Plate, setup supressor
    (1) / E17023041 / Aperture, source, housing
    (1) / E17023050 / Gate, focusfara, faraday
    (1) / E17024181 / Sheild, beam, target-entrance
    (1) / E17026530 / Plate, mounting, suppression electrode
    (1) / E17026610 / Plate, faraday
    (1) / E17026680 / Plate, ground, graphscan
    (1) / E17026690 / Plate, ground, rear, graphscan
    (1) / E17026720 / Plate, ground, graphscan-Scan
    (1) / E17030530 / Mirrorpart
    (4) / E17030580 / -
    (6) / E17036410 / Liners, graphite, dipole
    (1) / E17039040 / Aperture, exit, dipole
    (1) / E17045790 / Aperture, post scan assembly
    (4) / E17046560 / Screws, graphite, 1/4-20, post-scan assemblies
    (1) / E17061270 / Plate, ground, mirror, 60 kV
    (1) / E17063251 / Cap, crucible, coated, dual vaporizer
    (1) / E17079880 / Aperture, dual, 2-step reducer
    (2) / E17079910 / Shields, graphite, 2-step reducer
    (1) / E17103110 / Plate, scanner, front, ground
    (2) / E17106820 / Stop, beam dump, neutral
    (1) / E17119390 / Target, extension
    (1) / E17120450 / Shield, side wall
    (2) / E17120770 / Shield, back wall, full target
    (1) / E17122270 / Shield, traveling, faraday
    (1) / E17123251 / Shield, roplat
    (13) / E17143890 / Caps, graphite
    (1) / E17145700 / Shield, analyzer, long, upper, graphite
    (1) / E17145710 / Shield, analyzer, long, lower, graphite
    (1) / E17145720 / Shield, analyzer, short, upper, graphite
    (1) / E17145730 / Shield, analyzer, short, lower, graphite
    (2) / E17165250 / Shield, faraday, gate, thin, graphite
    (3) / E37000196 / Maintenance kits, 525 cold cathode Ion
    (2) / 4340400 / Bernas source assemblies, dual
    (2) / 4154600 / Bushing source, 50kV, bushing front, bushing mount
    (2) / E11059750 / Pump assembly, liquid 50/60 Hz.