| Axcelis P/N | Description | Material | RW GRADE |
| 17066871 | 17066871 RLT STRIKE FRAY VG | GR | R6650 |
| 17098511 | 17098511 Aperture Beam DEF PLT | GR | R6650 |
| 17099671 | 17099671 Outer End VGI G | GR | R6650 |
| 17121750 | 17121750 INNER CUP SHIELD (metal part) |
|
|
| 17122890 | 17122890 Shield Exit (Outer) | GR | R6650 |
| 17122900 | 17122900 Shield Exit (Inner) | GR | R6650 |
| 17122910 | 17122910 Liner Analyser Magnet | GR | R6650 |
| 17125561 | 17125561 EXTRACTION ELECTRODE | GR | R6650 |
| 17135960 | 17135960 Shower Tube Liner (Serrated) | GR | R6650 |
| 17138730 | 17138730 Aperture Back Bias VGI | GR | R6650 |
| 17138740 | 17138740 Rear Shield Reflector VGI | GR | R6650 |
| 17138750 | 17138750 Front Shield Reflector VGI | GR | R6650 |
| 17142660 | 17142660 HEAT SHIELD E.L.S. | ? |
|
| 17167970 | 17167970 SHIELD GRAPHITE VG SCREW | GR | R6650 |
| 17182570 | 17182570 Strike Plate (1) Disk | GR | R6650 |
| 17182580 | 17182580 Strike Plate (2) Disk | GR | R6650 |
| 17182590 | 17182590 Strike Plate (3) Disk | GR | R6650 |
| 17182600 | 17182600 Strike Plate (4) Disk | GR | R6650 |
| 17192410 | 17192410 Suppression Plate | GR | R6650 |
| 17192420 | 17192420 Electrode ground | GR | R6650 |
| 17192430 | 17192430 Ring Field | GR | R6650 |
| 17208240 | 17208240 Beam Defining Aperture Length | GR | R6650 |
| 17219790 | 17219790 Aperture Faraday RE50 | GR |
|
| 17231630 | 17231630 Aperture Quad Exit VG | GR | R6650 |
| 17242360 | 17242360 Base graphite Cover | GR | R6650 |
| 17242590 | 17242590 BEAM APERTURE DEFLECTOR VG | GR |
|
| 17249700 | 17249700 Shower Tube Ring Plasma Shower | GR | R6650 |
| 17250340 | 17250340 Aperture Selectable VG | GR | R6650 |
| 17267060 | 17267060 Aperture Plate linac 0.16 W | GR | R6650 |
| 17287860 | 17287860 CATHODE MTG PLT | GR | R6650 |
| 17289500 | 17289500 APERTURE WINGED RESOLVING HOUS | GR |
|
| 17320240 | 17320240 Shield Cup | GR | R6650 |
| 17320320 | 17320320 SPACER STRIKE PLATE | GR | R6650 |
| 17322150 | 17322150 SHIELD FARADAY CUP | GR | R6650 |
| 17331310 | 17331310 Aperture Left CVA (17264920) | GR | R6650 |
| 17331320 | 17331320 Aperture Right CVA (17264910) | GR | R6650 |
| 17099201 | Strike PLT (VTI) | GR | R6650 |
| 17099661 | Graphite VGI Outer Beam Dump | GR | R6650 |
| 17118510 | Pole Short ES Quad V | Graphite | R6650 |
| 17118520 | Pole Long ES Quad V | Graphite | R6650 |
| 17170040 | Extraction Aperture | Graphite | R6650 |
| 17132290 | Ground Insert VGI Leb | Graphite | R6650 |
| 17122880 | Shield Variable Electrode | Graphite | R6650 |